室温下，采用射频磁控溅射AZO粉末靶和Ag靶在玻璃基底上制备Ag层厚度分别为12 nm和15 nm两组对称结构掺铝氧化锌/银/掺铝氧化锌（AZO/Ag/AZO）透明导电薄膜，研究了Ag层和AZO层厚度对薄膜光电性能的影响。结果表明：3层薄膜的可见光区平均透光率达到了80%，550 nm处的最高透过率达到了88%，方块电阻小于5 Ω/□。Ag层厚度是影响AZO/Ag/AZO薄膜光电性能的主要因素，AZO层的厚度对薄膜光学性能影响较大。

The sandwich films composed of aluminum doped zinc oxide (AZO)/silver (Ag)/aluminum doped zinc oxide (AZO) layers were prepared on glass substrates by RF magnetron sputtering using AZO powder target and solid Ag target at room temperature. Two groups of AZO/Ag/AZO films were deposited with Ag thickness of 12 nm and 15 nm. The optical and electrical properties of the sandwich films were investigated. The results show that the average transmittance of the films are about 80% within the visible wavelength, and the highest transmittance is 88% at 550 nm. The sheet resistances of the multilayer films are lower than 5 Ω/□. The thickness of Ag layer is the main factor to affect the optical and electrical properties of AZO/Ag/AZO films. The thickness of AZO layer has a certain effect on the optical properties of the sandwich films.