光子学报, 2016, 45 (10): 1031001, 网络出版: 2016-11-14   

二阶关联成像系统宽光谱吸收膜研制

Study and Fabrication Broad Spectral Absorbing Film in Second-order Correlated Imaging System
作者单位
长春理工大学 光电工程学院, 长春 130022
摘要
为满足关联成像系统抑制背景的需求,选用Al、Cr和SiO2作为镀膜材料,依据薄膜吸收理论,结合膜系设计软件设计了宽光谱吸收膜,并采用真空沉积技术获得了该薄膜样品.通过真空阶梯式退火,减小了膜层内应力,解决了薄膜牢固度问题;采用交互式分析对测试结果逆向反演,通过优化工艺参量,使膜系中敏感薄层厚度得以精准控制,并减小了膜厚控制误差.制备的吸收膜在400~1 100 nm波段平均吸收率达到99.1%,满足系统使用要求.
Abstract
According to the demand for inhibiting background of the correlation system, Al, Cr and SiO2 were choosed as the coating materials. Based on the absorption theory, a broad spectrum absorbing film was designed by combining with the film design software, and by using the vacuum deposition technology, the film samples were prepared. The internal stress of the film was reduced by stepped vacuum annealing, and the problem of film adhesion was solved. Using the interactive analysis and reverse inversion methods to analyze the testing results, the thickness of sensitive thin layers was controlled precisely by optimizing the process parameters, as a result, and the thickness control error was reduced. The average absorptivity of prepared absorbing film is 99.1% at the band of 400~1 100 nm, which meets the requirements of the system.

付秀华, 熊仕富, 刘冬梅, 张静, 程慧婷. 二阶关联成像系统宽光谱吸收膜研制[J]. 光子学报, 2016, 45(10): 1031001. FU Xiu-hua, XIONG Shi-fu, LIU Dong-mei, ZHANG Jing, CHENG Hui-ting. Study and Fabrication Broad Spectral Absorbing Film in Second-order Correlated Imaging System[J]. ACTA PHOTONICA SINICA, 2016, 45(10): 1031001.

本文已被 3 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!