为制作应用于在线诊断光谱仪的高分辨率光栅, 通过分析记录参数误差对光栅刻线密度、 聚焦曲线、 谱像宽度等的影响及规律, 提出相应的补偿方法是必要前提。 基于费马原理、 光程差理论及像差理论, 分析了光栅光谱性能对记录参数误差的影响及其敏感性。 在光栅使用参数固定的情况下, 记录角度误差对光谱性能影响较大, 在光栅设计时可通过对记录角度加权的方法来提高记录角度的取值的精确度; 记录臂长误差对光谱性能影响较小; 记录臂长和记录角度的相对误差决定了其对光栅光谱性能影响程度。 结果表明, 单侧记录臂长和角度误差对光谱性能的影响, 可分别通过调节两臂臂长及角度的相对误差进行补偿。 由此可以确定对应用于在线监测光谱仪光栅成像质量影响较大的误差因素, 并给出制作误差的相应补偿方法, 降低曝光系统的调试难度, 为制作在线诊断光谱仪用高分辨率光栅提供理论指导。

To making the high resolution grating, a numerical calculation was used to analyze the effect of recording parameters on groove density, focal curve and imaging performance of the grating and their compensation. Based on Fermat’s principle, light path function and aberration, the effect on imaging performance of the grating was analyzed. In the case of fixed using parameters, the error of the recording angle has a greater influence on imaging performance, therefore the gain of the weight of recording angle can improve the accuracy of the recording angle values in the optimization; recording distance has little influence on imaging performance; the relative errors of recording parameters cause the change of imaging performance of the grating; the results indicate that recording parameter errors can be compensated by adjusting its corresponding parameter. The study can give theoretical guidance to the fabrication for high resolution varied-line-space plane holographic grating in on-line spectral diagnostic and reduce the alignment difficulty by analyze the main error effect the imaging performance and propose the compensation method.