采用三种商业3D打印机尝试加工了金属材质和树脂材质的微型靶零件。通过EOSINT M290 3D打印机以激光烧结的方式加工了钛金属靶架；通过Object 30 Pro 3D打印机以聚丙烯树脂为材料,通过喷射打印的方式加工了构型复杂的树脂靶架；通过Freeform Pico 3D打印机以蜡质树脂为材料,通过光固化成型的加工方式,获得了微腔、圆柱和平面元件,并在其表面设计了周期性图形结构。采用光学工具显微镜和共聚焦显微镜对样品的尺寸和表面形貌进行了表征。结果表明：金属靶架的线粗糙度为7.3~17.79 μm,抛光之后降低为0.87~1.66 μm；树脂靶架的面均方根粗糙度为2.88 μm；微腔和圆柱元件端面的面均方根粗糙度为2.03 μm,表面的条纹周期与设计值偏差为1.40%,平均振幅值偏差为55.50%；平面元件的面均方根粗糙度为4.87 μm,表面调制图形的周期与设计值偏差为0.80%,平均振幅偏差为3.60%。通过商业3D打印机加工靶零件,为惯性约束聚变实验中微靶零件的加工提供了新思路。

Three commercial 3-dimension printers were used to fabricate micro target components with metal and resin materials. A titanium metal target frame was fabricated by EOSINT M290 3D printer by the means of Laser Sintering. Resin target frames, microcavity and cylinder were fabricated by Object 30 Pro 3D printer through Polyjet means using polypropylene resin as printing material. The surface of microcavity, cylinder and slice designed with periodic pattern were fabricated by Freeform Pico 3D printer through the means of stereo lithography apparatus applying wax resin as printing material. The size and surface morphology of samples were characterized by optical microscope and laser scanning confocal microscope. The results show that the line roughness of titanium metal target frame is 7.3-17.79 μm and it decreased to 0.87-1.66 μm after polishing. The root mean square roughness (RMS) of resin frame is 2.88 μm. The RMS of the end surface of microcavity and cylinder is 2.03 μm; the deviation between measured value and designed value of streak pattern period on the microcavity and cylinder side is 1.40% and that of amplitude is 55.50%. The RMS of slice component is 4.87 μm, the deviation of modulation pattern period is 0.80% and that of the amplitude is 3.60%. Application of commercial 3D printer to fabricate micro target components, with high efficiency and low cost provides a new approach for the manufacturing of target components used in inertial confinement fusion experiment.