自20世纪60年代激光器被发明以来, 其脉冲宽度被不断压缩至亚皮秒及飞秒量级, 使得激光加工技术进入到了超短脉冲阶段。与其它加工技术相比, 超短脉冲激光微孔加工突破了对尺度和材料的限制, 并具有高精度和自动化等优点。主要论述了超短脉冲激光微孔加工的优势, 如“冷”加工、突破衍射极限的低微米及纳米量级的加工等。介绍了超短脉冲激光微孔加工中的三个经典模型, 包括孔径和阈值关系模型、多脉冲累积模型和单脉冲烧蚀深度模型。简述了超短脉冲激光微孔加工的实验研究现状, 并给出了存在的问题和展望。

Since the invention of lasers in the 1960s, the pulse duration has been continuously shorten down to the sub-picosecond and even femtosecond regime. It makes the laser processing technology in the ultrashort pulse laser era. Compared with other methods, the ultrashort pulse laser drilling of micro-hole is independent of the size and materials, and it has the advantages of high precision and automation. The advantages, such as the "cold" processing, breaking the diffraction limit, for ultrashort pulse laser drilling of micro-hole were presented. Three classical models were demonstrated, which were the threshold fluence-hole diameter model, the multi-pulse cumulative model and the single-pulse ablation depth model. The experimental studies for ultrashort pulse laser drilling of micro-hole were analyzed. Furthermore, the challenging issues and prospects were concluded.