针对传统电光调制器存在调制速度慢、损耗高和封装尺寸大等问题, 采用高电光系数的高分子材料, 结合狭缝波导理论, 提出了一种基于振荡微环的电光调制器, 并利用COMSOL Multiphysics和Lumerical FDTD solutions仿真软件对该调制器的关键性能进行仿真分析。分析结果表明: 该电光调制器在小封装尺寸条件下, 具有优异的光电性能, 而且兼容互补金属氧化物半导体(CMOS)标准制造工艺。

Aiming to the problems of slow modulation speed, high loss, and large package size of traditional electro-optic modulators, an electro-optic modulator based on oscillating microring is proposed by using high electro-optic coefficient polymer materials and the theory of slit waveguide. The key performance of the modulator is analyzed by using COMSOL Multiphysics and Lumerical FDTD solutions simulation software. The analysis results show that the electro-optic modulator has excellent photoelectric performance under the condition of small package size and is compatible with complementary metal oxide semiconductor(CMOS) standard manufacturing process.