光学学报, 2020, 40 (24): 2428001, 网络出版: 2020-12-03
高灵敏复合光波导硫化氢气体传感器的研究 
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Highly-Sensitive Hydrogen-Sulfide Gas Sensor Based on Composite Optical Waveguide
传感器 复合光波导 酞菁锌 TiO2 硫化氢 sensors composite optical waveguide zinc phthalocyanine TiO2 hydrogen sulfide
摘要
通过浸渍提拉法制备出TiO2薄膜/锡掺杂玻璃复合光波导(OWG)元件,在其表面利用旋转甩涂法固定一层酞菁锌(ZnPc)敏感层,制备了高灵敏度的硫化氢(H2S)复合OWG气体传感器。优化传感器的制备条件,当提拉机的提拉速度为80 mm·min -1、匀胶机转速为1600 r·min -1、ZnPc的质量分数为0.05%时,该传感器对H2S气体的选择性响应最佳,可以检测到体积分数为1×10 -9的H2S气体。此外,该传感器在一个月内表现出良好的稳定性。
Abstract
In this paper, a TiO2 film/tin-diffused glass composite optical waveguide (OWG) component is prepared by the dip-coating method, and a zinc phthalocyanine (ZnPc) sensitive layer is fixed on the surface by the spin coating method to prepare a highly-sensitive hydrogen sulfide (H2S) gas sensor based on a composite OWG. The preparation conditions of sensors is optimized. When the dip-coating speed of the dip coater is 80 mm·min -1, the rotating speed of the spin coater is 1600 r·min -1, and the mass fraction of the ZnPc solution is 0.05%, the sensor has the best selective response to H2S gas and can detect the H2S gas with a volume fraction of 1×10 -9. In addition, the sensor shows good stability within one month.
克迪里亚·吾麦尔, 姑丽各娜·买买提依明, 买买提艾沙·苏莱曼, 帕提曼·尼扎木, 阿布力孜·伊米提. 高灵敏复合光波导硫化氢气体传感器的研究[J]. 光学学报, 2020, 40(24): 2428001. Wumaier Kediliya, Mamtimin Gulgina, Sulaiman Maimaitiaisha, Nizamidin Patima, Yimit Abliz. Highly-Sensitive Hydrogen-Sulfide Gas Sensor Based on Composite Optical Waveguide[J]. Acta Optica Sinica, 2020, 40(24): 2428001.
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