1 National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Integrated Circuits, Peking University, Beijing 100871, China
2 School of Electronics, Peking University, Beijing 100871, China
3 School of Automation, University of Science and Technology Beijing, Beijing 100083, China
4 School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100096, China
5 State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
6 University of Chinese Academy of Sciences, Beijing 100049, China
7 Beijing Advanced Innovation Center for Integrated Circuits, Beijing 100871, China
8 Frontiers Science Center for Nano-optoelectronics, Peking University, Beijing 100871, China