An improved method of angle measurement with a position sensitive detector

Defeng Zheng; Xiangzhao Wang; Feng Tang

Chinese Optics Letters, 2007, 5 (7): 403, Published Online: Jul. 11, 2007

An improved method of angle measurement with a position sensitive detector Download： 737次

论文大纲

Defeng Zheng ^1,2,*Xiangzhao Wang ^1,2Feng Tang ¹

Author Affiliations

¹ Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

² Graduate School of the Chinese Academy of Sciences, Beijing 100039

角度测量干涉仪平行平板 PSD位置探测 120.3180 Interferometry 120.4640 Optical instruments 120.0120 Instrumentation, measurement, and metrology

Abstract

An improved method of angle measurement is proposed based on a parallel plate interferometer. A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection angle measurement. A reflecting mirror is introduced for increasing the measurement resolution. In experiments, a deflection angle of a measured target was measured within about 3 deg. with high accuracy. And as a phase modulating interferometer, it was used to measure a small angular displacement with a repeatability of 5.5*10^(-8) rad.

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Defeng Zheng, Xiangzhao Wang, Feng Tang. An improved method of angle measurement with a position sensitive detector[J]. Chinese Optics Letters, 2007, 5(7): 403.

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