Author Affiliations
Abstract
1 Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2 Graduate School of the Chinese Academy of Sciences, Beijing 100039
An improved method of angle measurement is proposed based on a parallel plate interferometer. A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection angle measurement. A reflecting mirror is introduced for increasing the measurement resolution. In experiments, a deflection angle of a measured target was measured within about 3 deg. with high accuracy. And as a phase modulating interferometer, it was used to measure a small angular displacement with a repeatability of 5.5*10^(-8) rad.
角度测量 干涉仪 平行平板 PSD位置探测 120.3180 Interferometry 120.4640 Optical instruments 120.0120 Instrumentation, measurement, and metrology Chinese Optics Letters
2007, 5(7): 403