强激光与粒子束, 2010, 22 (2): 327, 网络出版: 2010-05-28  

多层膜界面结构探测技术

Detection of multi-layer interface structure
作者单位
中国工程物理研究院 激光聚变研究中心,四川 绵阳 621900
摘要
分别以丙醇锆和正硅酸乙酯为原料,采用溶胶-凝胶工艺制备了性能稳定的ZrO2和SiO2溶胶。用旋转镀膜法在K9玻璃上分别制备了SiO2单层膜、ZrO2单层膜和ZrO2/SiO2/ZrO2三层膜。采用椭偏仪测量薄膜的厚度与折射率,用紫外-可见分光光度计测量了薄膜的透过率,利用TFCalc_Demo模系设计软件,采用三层理论模型对薄膜的透过率进行模拟,用扫描电镜(SEM)观察了三层膜的断面结构,用X射线光电子能谱仪(XPS)测量了薄膜的成分随深度方向的变化,进一步验证了ZrO2/SiO2/ZrO2三层膜之间的渗透关系,同时对多层膜的界面结构探测方法起到了借鉴作用。
Abstract
The single-layer SiO2,single-layer ZrO2,ZrO2/SiO2/ZrO2 three-layer thin films were deposited on K9 glass by sol-gel spin-coating method. The colloidal suspension of ZrO2 was prepared by Zr(OPr)4 and that of SiO2 was prepared by TEOS. An ellipsometer was used to measure the thickness and refractive index of the films,and a UV-Vis spectrophotometer was used to measure the transmittance of the films. By the TFCalc thin film design software,the transmittance of the films was simulated. The vertical section of the ZrO2/SiO2/ZrO2 three-layer film was probed by scanning electron microscopy,X-ray photoelectron spectroscopy(XPS) was used to measure the variation of composition in its thickness direction,and the relationship of infiltration between the three layers was confirmed.
参考文献

[1] 沈军,王珏,吴广明,等.化学法制备光学薄膜及其应用[J].原子能科学技术,2002,36(4):305-308.(Shen Jun,Wang Jue,Wu Guangming,et al. Techniques and applications of sol-gel derived coatings. Atomic Energy Science and Technology,2002,36(4):305-308)

[2] 孙承纬.激光辐照技术[M].北京:国防工业出版社,2002:293-306.(Sun Chengwei. Laser irradiation technology. Beijing: National Defense Industry Press,2002:293-306)

[3] 杨帆,沈军,吴广明,等.ZrO2/SiO2多层膜的化学法制备研究[J].强激光与粒子束,2003,15(4):326-330.(Yang Fan,Shen Jun,Wu Guangming,et al. Preparation of ZrO2/SiO2 multilayer films via chemical methods. High Power Laser and Particle Beams,2003,15(4):326-330)

[4] 吴周令,范正修.TiO2/SiO2,ZrO2/SiO2多层介质膜光学损耗及激光损伤研究[J].中国激光,1989,16(8):468-470.(Wu Zhouling,Fan Zhengxiu. Measurement of optical loss and damage resistance of TiO2/SiO2 and ZrO2/SiO2 laser mirrors. Chinese Journal of Lasers,1989,16(8):468-470)

[5] Mclnnes H A,Andrew J E,Bazin N J,et al. Alternative coating materials and treatments for the manufacture of ultra-violet sol-gel mirrors[C]//Proc of SPIE. 2000,3902:215-223.

[6] Vong M S W,Sermon P A,Sun Y. Sol-gel processing of zirconia high-index coatings[C]//Proc of SPIE. 1995,2633:446-456.

[7] Azzam R M A,Bashara N M. Ellipsometry and polarized light[M]. Amsterdam: North-Holland Publishing Co,1997.

[8] Nowak M. Determination of optical constants and average thickness of inhomogeneous-rough thin films using spectral dependence of optical transmittance[J]. Thin Solid Films,1995,254:200-210.

[9] 王毕艺,祖小涛,赵松楠,等.ZrO2/SiO2溶胶-凝胶薄膜膜层间的渗透行为[J].强激光与粒子束,2007,19(9):1497-1500.(Wang Biyi,Zu Xiaotao,Zhao Songnan,et al. Infiltrating between ZrO2 and SiO2 sol-gel films. High Power Laser and Particle Beams,2007,19(9):1497-1500)

[10] 王毕艺,蒋晓东,袁晓东,等.ZrO2/SiO2双层膜膜间渗透行为初步研究[J].中国激光,2008,35(3):440-444.(Wang Biyi,Jiang Xiaodong,Yuan Xiaodong,et al. Primary study of the infiltrating between two-layer ZrO2/SiO2 sol-gel films. Chinese Journal of Lasers,2008,35(3):440-444)

赵松楠, 吕海兵, 王韬, 袁晓东, 郑万国. 多层膜界面结构探测技术[J]. 强激光与粒子束, 2010, 22(2): 327. Zhao Songnan, Lü Haibing, Wang Tao, Yuan Xiaodong, Zheng Wanguo. Detection of multi-layer interface structure[J]. High Power Laser and Particle Beams, 2010, 22(2): 327.

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