激光与光电子学进展, 2019, 56 (12): 120101, 网络出版: 2019-06-13
CAPIS技术探测波前畸变的实验研究 
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Experimental Study onWavefront Distortion Detection Using CAPIS Technology
图 & 表
图 1. 波前传感器结构示意图。(a)哈特曼波前传感器;(b) CAPIS结构
Fig. 1. Structural diagram of wavefront sensor. (a) Hartmann wavefront sensor; (b) structure of CAPIS
图 2. CAPIS结构探测波前原理图。(a)理想平面波前;(b)畸变波前
Fig. 2. Principle diagram of wavefront detection using CAPIS structure. (a) Ideal plane wavefront ;(b)distorted wavefront
图 3. 像差重构结果。(a)(b)(c)像散;(d)(e)(f)彗差;(g)(h)(i)三瓣叶
Fig. 3. Reconstructed results of aberration. (a)(b)(c) Astigmatism; (d)(e)(f) coma; (g)(h)(i) three-leaf
图 4. 组合像差重构结果。(a)(b)(c)前10项Zernike多项式组合;(d)(e)(f)前15项Zernike多项式组合
Fig. 4. Reconstructed results of combined aberration. (a)(b)(c) First 10 Zernike polynomial combination; (d)(e)(f) first 15 Zernike polynomial combination
图 6. 像散像差重构结果。 (a)探测器上光斑阵列;(b)待测像散像差分布;(c)重构像差分布;(d)残差分布
Fig. 6. Reconstructed results of astigmatic aberration. (a) Light spot array on detector; (b) astigmatic aberration distribution to be measured; (c) reconstructed aberration distribution; (d) residual distribution
图 7. 彗差像差重构结果。(a)探测器上光斑阵列;(b)待测彗差像差分布;(c)重构像差分布;(d)残差分布
Fig. 7. Reconstructed results of coma aberration. (a) Light spot array on detector; (b) coma aberration distribution to be measured; (c) reconstructed aberration distribution; (d) residual distribution
图 8. 三瓣叶像差重构结果。(a)探测器上光斑阵列;(b)待测三瓣叶像差分布;(c)重构像差分布;(d)残差分布
Fig. 8. Reconstructed results of three-leaf aberration. (a) Light spot array on detector; (b) three-leaf aberration distribution to be measured; (c) reconstructed aberration distribution; (d) residual distribution
图 9. 前10项Zernike多项式组合像差重构结果。(a)探测器上光斑阵列;(b)待测的组合像差分布;(c)重构的像差分布;(d)残差分布
Fig. 9. Reconstructed results of first 10 Zernike combination aberration. (a) Light spot array on detector; (b) combined aberration distribution to be measured; (c) reconstructed aberration distribution; (d) residual distribution
图 10. 前15项Zernike多项式组合像差重构结果。 (a)探测器上光斑阵列;(b)待测的组合像差分布;(c)重构的像差分布;(d)残差分布
Fig. 10. Reconstructed results of first 15 Zernike combination aberration. (a) Light spot array on detector; (b) combined aberration distribution to be measured; (c) reconstructed aberration distribution; (d) residual distribution
柯熙政, 杨珂, 张颖. CAPIS技术探测波前畸变的实验研究[J]. 激光与光电子学进展, 2019, 56(12): 120101. Xizheng Ke, Ke Yang, Ying Zhang. Experimental Study onWavefront Distortion Detection Using CAPIS Technology[J]. Laser & Optoelectronics Progress, 2019, 56(12): 120101.
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