激光与光电子学进展, 2004, 41 (2): 47, 网络出版: 2006-06-12
准分子激光微制造技术及其应用
Excimer Laser Based Micro-Manufacturing Technology and Its Application
摘要
比较分析四种微加工工艺的基本特征和技术难点,简述准分子激光与Nd∶YAG激光微制造技术的特点和应用范围。结合华中科技大学准分子激光微制造工作站的建设及其在微钻孔、微切割等方面的实际应用,分析准分子激光在MEMS(微机电系统)键合、焊接、封装过程中应用的可能性。
Abstract
A comparison was given of properties of four micro-machining processes. Excimer laser)and Nd∶YAG laser based micro-machining were described. An excimer laser based micro-machining workstation in Huazhong University of Science and Technology was installed, which was used in micro-drilling and micro-cutting.. The workstation will be modified for cutting, die bonding, wire bonding, welding, and post-packaging in MEMS.
陈志凌, 史铁林, 刘胜, 熊良才. 准分子激光微制造技术及其应用[J]. 激光与光电子学进展, 2004, 41(2): 47. 陈志凌, 史铁林, 刘胜, 熊良才. Excimer Laser Based Micro-Manufacturing Technology and Its Application[J]. Laser & Optoelectronics Progress, 2004, 41(2): 47.
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