2000 l/mm X射线镂空透射光栅的制备研究

在满足工艺要求的前提下,通过模拟光栅衍射,设计出镂空透射光栅模型,在此基础上将电子束和X射线光刻技术相结合,研究了制造2000 l /mm X射线镂空透射光栅的新工艺技术。首先利用电子束光刻和微电镀技术在镂空聚酰亚胺薄膜底衬上制备X射线母光栅掩模,然后利用X射线光刻和微电镀技术实现了光栅图形的复制,之后采用紫外光刻和微电镀技术制作加强筋结构,最后通过腐蚀体硅和等离子体刻蚀聚酰亚胺完成镂空透射光栅的制作。从此新的制造工艺结果上来看,制备的光栅栅线平滑,占空比合理,侧壁陡直,不同光栅之间一致性好,完全可以满足应用需求,充分表明了该制造技术是透射式X射线衍射光学元件制造的良好选择。

Abstract

Within the limit of fabricating techniques,2000 l /mm self-standing transmission gratings model was designed. And by combining the techniques of electronic-beam lithography and X-ray lithography,the 2000 l /mm X-ray self-standing transmission gratings was fabricated. Firstly,the electronic-beam lithography and micro-electroplating technology was used to prepare a master mask of gratings on polyimide membrane substrate. Then by using X-ray lithography and micro-electroplating,child gratings was replicated on the master mask. And the self-standing graph was transferred to the daughter gratings via utraviolet (U-V) lithography and micro-electroplating. Finally,with the technology of etching and inductively coupled plasma (ICP),the fabrication of X-ray self-standing transmission gratings was fulfilled. From the fabrication results of the gratings,it shows that bars smoothness,the absent ratio and the profile of the gratings are all desired.

参考文献

[1] A. C. Brinkman,C. J. T. Gunsing,J. S. Kaastra et al.. First light measurements of Capella with the low energy transmission grating spectrometer aboard the Chandra X-ray observatory[J]. Astrophysical Journal Letters,2000,530(02):L111-L114

[2] T. H. Markert,D. Dewey,J. E. Davis et al.. Modeling the diffraction efficiencies of the AXAF high-energy transmission gratings[C]. SPIE,1995,2518:424-427

[3] K. A. Flanagan,T. T. Fang,C. Baluta et al.. Modeling the diffraction efficiencies of the AXAF high-energy transmission gratings:Ⅱ[C]. SPIE,1995,2808:650-676

[4] D. A. Fedin,V. Kantsyrev,B. Bauer et al..“Polychromator”five channel X-ray/EUV spectrometer with imaging transmission grating for plasma diagnostics[C]. SPIE,1999,3764:80-84

[5] Xu Xiangdong,Hong Yilin,Tian Yangchao et al.. Fabrication of self-supporting transmission gratings for plasma diagnostics [C]. SPIE,1999,3766:380-385

[6] 王劼,李红红,王峰等. 软X射线磁性圆二色光束线的调试和实验[J]. 核技术,2005,28(07):489-495

Wang Jie,Li Honghong,Wang Feng et al.. Commissions and experiments of soft X-ray magnetic circular dichroism beamline[J]. Nuclear Techniques,2005,28(07):489-495

[7] 邓健,钟方川,覃岭等. 高效高分辨率大面积透射光栅谱仪特性的理论分析[J]. 光学学报,2000,20(5):647-653

Deng Jian,Zhou Fangchuan,Qing Ling et al.. Theoretical analysis of characteristics of the high efficiency high resolution soft X-ray transmission grating spectrograph[J]. Acta Optica Sinica,2000,20(5):647-653

[8] C. R. Canizares,J. E. Davis,D. Dewey et al.. The chandra high energy transmission grating:design,fabrication,ground calibration and five years in flight [J]. Publications of the Astronomical Society of the Pacific,2005,117(07):1144-1171

[9] 徐向东,洪义麟,霍同林等. 软X射线透射光栅制作技术[J]. 光学技术,2001,27(04):294-296

Xu Xiangdong,Hong Yilin,Huo Tonglin et al.. The fabrication techniques for soft X-ray transmission gratings[J]. Optical Technology,2001,27(04):294-296

[10] 朱伟忠,吴衍青,陈敏等. 13.4 nm软X射线干涉光刻透射光栅的优化设计[J]. 光学学报,2008,28(07):1225-1230

Zhu Weizhong,Wu Yanqing,Chen Min et al.. Optimized design of transmission grating used for 13.4 nm soft X-ray interference lithography[J]. Acta Optica Sinica,2008,28(07):1225-1230

[11] 邱克强,徐向东,刘颖等. 软X射线位相型金透射光栅的设计与制作[J]. 物理学报,2008,57(10):6239-6244

Qiu Keqiang,Xu Xiangdong,Hong Yilin et al.. Design and fabrication of gold transmission phase gratings for soft X-rays[J]. Acta Physica Sinica,2008,57(10):6239-6244

[12] 朱效立,马杰,谢常青等. 3333 lp/mm X射线透射光栅的研制[J]. 光学学报,2008,28(06):1026-1030

Zhu Xiaoli,Ma Jie,Xie Changqing et al.. Fabrication of 3333 lp/mm soft X-ray transmission gratings[J]. Acta Optica Sinica,2008,28(06):1026-1030

[13] M. L. Schattenburg,R. J. Aucoin,R. C. Fleming et al.. Fabrication of high energy X-ray transmission gratings for AXAF[C]. SPIE,1994,2280:181-190

[14] 徐向东,洪义麟,霍同林等. 同步辐射Laminar光栅的研制[J]. 光学技术,2001,27(05):459-461

Xu Xiangdong,Hong Yilin,Huo Tonglin et al.. Fabrication of Laminar grating for synchrotron radiation[J]. Optical Technology,2001,27(05):459-461

[15] H. W. Schnopper,L. P. van Speybroeck,J. P. Delvaille et al.. Diffraction grating transmission efficiencies for XUV and soft X-ray[J]. Appl. Opt.,1977,16(04):1088-1091

[16] 杨家敏,易荣清,陈正林等. 透射光栅对软X射线衍射效率的研究[J]. 物理学报,1998,47(4):0613-0618

Yang Jiamin,Yi Rongqing,Chen Zhenglin et al.. Study of transmission grating diffraction efficiency for soft X-rays[J]. Acta Physica Sinica,1998,47(4):0613-0618

李海亮, 吴坚, 朱效立, 谢常青, 刘明, 曹磊峰. 2000 l/mm X射线镂空透射光栅的制备研究[J]. 光学学报, 2009, 29(10): 2650. Li Hailiang, Wu Jian, Zhu Xiaoli, Xie Changqing, Liu Ming, Cao Leifeng. Fabrication and Study of 2000 l/mm X-Ray Self-Standing Transmission Gratings[J]. Acta Optica Sinica, 2009, 29(10): 2650.

2000 l/mm X射线镂空透射光栅的制备研究

关于本站 Cookie 的使用提示

全站搜索

2000 l/mm X射线镂空透射光栅的制备研究

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索