中国激光, 2015, 42 (4): 0416001, 网络出版: 2015-02-02
光刻机照明光瞳测量用傅里叶变换物镜光学设计 
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Optical Design of Fourier Transform Lens for Measurement of Illumination Pupil of Lithography Tools
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蔡燕民, 王向朝, 步扬, 黄惠杰. 光刻机照明光瞳测量用傅里叶变换物镜光学设计[J]. 中国激光, 2015, 42(4): 0416001.
Cai Yanmin, Wang Xiangzhao, Bu Yang, Huang Huijie. Optical Design of Fourier Transform Lens for Measurement of Illumination Pupil of Lithography Tools[J]. Chinese Journal of Lasers, 2015, 42(4): 0416001.
蔡燕民, 王向朝, 步扬, 黄惠杰. 光刻机照明光瞳测量用傅里叶变换物镜光学设计[J]. 中国激光, 2015, 42(4): 0416001. Cai Yanmin, Wang Xiangzhao, Bu Yang, Huang Huijie. Optical Design of Fourier Transform Lens for Measurement of Illumination Pupil of Lithography Tools[J]. Chinese Journal of Lasers, 2015, 42(4): 0416001.
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