光学学报, 1992, 12 (10): 941, 网络出版: 2007-09-11
非镜面膜的椭偏研究
Ellipsometry study on the non-mirr or surface films
SnO2:F绒面膜 界面膜 散射矩阵 椭偏光谱法 SnO2:F film with chorionic surface interface film scattering matrix spectroscopic ellipsometry
摘要
本文提出了SnO2:F绒面膜的三层膜模型;从表示平面波传播性质的界面矩阵和膜层矩阵出发,导出了三层膜系统的散射矩阵和总反射系数,建立了反射式椭偏术的基本公式;利用反射式椭偏光谱法,测得SnO_2:F绒面膜的厚度和色散关系.
Abstract
The three-layer-film model for SnO2:F film with chorionic surfaces is suggested. Using the matrix of interface and the layer matrix representing the properties of propogation of plane waves, we have deduced the scattering matrix and the overall reflection coefficient of the three-layer structure and obtained the basic formula of the reflection ellipsometry. The dispersion relation and thickness of SnO2:F films with chorionic surfaces have been measured by using the spectroscopic reflection ellipsometry.
参考文献
张淑芝, 王志刚, 李淑英. 非镜面膜的椭偏研究[J]. 光学学报, 1992, 12(10): 941. 张淑芝, 王志刚, 李淑英. Ellipsometry study on the non-mirr or surface films[J]. Acta Optica Sinica, 1992, 12(10): 941.
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