大功率长焦深高斯光束整形设计

为了大功率激光设备工作时, 减小高斯光束束腰半径外低能量所产生的边缘效应, 避免出现毛边、搭接痕迹明显等问题, 需要对它进行光束整形设计。针对大功率激光光源特性(输出平均光功率为500 W, 脉冲宽度为130~160 ns, 重复频率为20~50 kHz, 波长为1 064 nm, 功率调节范围为10%~100%), 为了减小系统的复杂性, 提高激光能量的利用率, 采用伽利略式非球面透镜整形系统进行参数优化; 选取平顶洛伦兹模型为物理模型, 根据能量守恒定律求得入射光与出射光之间的映射关系; 采用光学软件对系统的结构参数和非球面系数进行优化。计算平顶光束在出射距离20,30 mm时的输出能量均匀度。结果表明: 系统的工作焦深在20～30 mm时, 平顶区激光能量均匀度均大于78.0%。以锈蚀的低碳钢板为作用目标进行了激光清洗实验, 光斑作用区域内, 激光与物质相互作用均匀, 证明本设计能满足大功率激光使用环境的要求。

Abstract

To reduce the edge effect of low energy outside the waist radius of a Gaussian beam when high-power laser equipment is operating and avoid the problems of edge and lap marks, it is necessary to design effective beam shaping. First, to reduce the complexity of the system and improve the utilization of the laser energy, a high-power Gaussian laser light source(average optical power of 500 W, pulse widths in 130-160 ns, wavelength of 1 064 nm, and power regulation range of 10%-100%) was optimized using the Galileo aspheric lens shaping system.Second, through the law of conservation of energy, the mapping relationship between incident and emitted light was obtained, and the structural parameters and aspheric coefficients of the system were optimized and simulated using optical software. The output energy uniformity of the flat-top beam at ejection distances of 20,25, and 30 mm was calculated. The results show that the energy uniformity of the flat-top region is greater than 78.0% when the focal depth of the system is between 20 and 30 mm. A laser cleaning experiment is conducted using a rusted low-carbon steel plate. The interaction between laser and material is uniform in the area of spot action, proving that the design can meet the requirements of high-power laser environments.

参考文献

[1] 王方雨, 孙强, 常颖, 等. 用于光学相干层析系统的三反射镜光束整形扫描机构的光学设计［J］. 光学精密工程, 2018, 26(11): 2654-2661.

王方雨, 孙强, 常颖, 等. 用于光学相干层析系统的三反射镜光束整形扫描机构的光学设计［J］. 光学精密工程, 2018, 26(11): 2654-2661.

WANG F Y, SUN Q, CHANG Y, et al.. Optical design of three-mirror beam shaping scanner for optical coherence tomography［J］. Opt. Precision Eng., 2018, 26(11): 2654-2661.(in Chinese)

[2] 周建忠, 李华婷, 孙奇, 等. 基于清洗表面形貌的AH32钢激光除锈机制［J］. 光学精密工程, 2019, 27(8): 1754-1764.

周建忠, 李华婷, 孙奇, 等. 基于清洗表面形貌的AH32钢激光除锈机制［J］. 光学精密工程, 2019, 27(8): 1754-1764.

ZHOU J ZH, LI H T, SUN Q, et al.. Laser derusting mechanism of AH32 steel based on cleaned surface topography［J］. Opt. Precision Eng., 2019, 27(8): 1754-1764.(in Chinese)

[3] 陈泳屹, 秦莉, 佟存住, 等. 用于光束整形的表面等离子体双光栅结构［J］. 光学精密工程, 2014, 22(6): 1461-1468.

陈泳屹, 秦莉, 佟存住, 等. 用于光束整形的表面等离子体双光栅结构［J］. 光学精密工程, 2014, 22(6): 1461-1468.

CHEN Y Y, QIN L, TONG C ZH, et al.. Dual gratings based on surface plasmons for optical beam shaping［J］. Opt. Precision Eng., 2014, 22(6): 1461-1468.(in Chinese)

[4] 夏国才, 孙小燕, 段吉安. 用于实现激光高效率加工的光束整形技术［J］. 激光与光电子学进展, 2012, 49(10): 100002.

夏国才, 孙小燕, 段吉安. 用于实现激光高效率加工的光束整形技术［J］. 激光与光电子学进展, 2012, 49(10): 100002.

XIA G C, SUN X Y, DUAN J A. Beam shaping technologies for high efficiency laser fabrication［J］. Laser & Optoelectronics Progress, 2012, 49(10): 100002.(in Chinese)

[5] 余金清, 尹韶云, 殷智勇, 等. 高均匀长工作深度激光整形系统设计［J］. 光电工程, 2014, 41(8): 80-84.

余金清, 尹韶云, 殷智勇, 等. 高均匀长工作深度激光整形系统设计［J］. 光电工程, 2014, 41(8): 80-84.

YU J Q, YIN SH Y, YIN ZH Y, et al.. High uniform long working depth laser shaping system design［J］. Opto-Electronic Engineering, 2014, 41(8): 80-84.(in Chinese)

[6] 邱基斯, 樊仲维, 唐熊忻. 超高斯平顶分布光束空间整形技术研究［J］. 光电子·激光, 2014, 25(2): 233-238.

邱基斯, 樊仲维, 唐熊忻. 超高斯平顶分布光束空间整形技术研究［J］. 光电子·激光, 2014, 25(2): 233-238.

QIU J S, FAN ZH W, TANG X X. Research on spatial shaping technology of super-Gaussian flattopped distributed beam［J］. Journal of Optoelectronics·Laser, 2014, 25(2): 233-238.(in Chinese)

[7] SCHEPERS F, BEXTER T, HELLWIG T, et al.. Selective Hermite-Gaussian mode excitation in a laser cavity by external pump beam shaping［J］. Applied Physics B, 2019, 125(5): 1-8.

SCHEPERS F, BEXTER T, HELLWIG T, et al.. Selective Hermite-Gaussian mode excitation in a laser cavity by external pump beam shaping［J］. Applied Physics B, 2019, 125(5): 1-8.

[8] 庄雯, 张宁, 徐熙平, 等. 用于激光光束整形的连续自由曲面的设计［J］. 光学技术, 2019, 45(1): 21-28.

庄雯, 张宁, 徐熙平, 等. 用于激光光束整形的连续自由曲面的设计［J］. 光学技术, 2019, 45(1): 21-28.

ZHUANG W, ZHANG N, XU X P, et al.. Design of continuous freeform surfaces used for laser beam shaping［J］. Optical Technique, 2019, 45(1): 21-28.(in Chinese)

[9] ROY FRIEDEN B. Lossless conversion of a plane laser wave to a plane wave of uniform irradiance［J］. Applied Optics, 1965, 4(11): 1400-1403.

ROY FRIEDEN B. Lossless conversion of a plane laser wave to a plane wave of uniform irradiance［J］. Applied Optics, 1965, 4(11): 1400-1403.

[10] 冯科, 李劲松. 高斯光束非球面镜整形系统的设计［J］. 光电工程, 2013, 40(5): 127-132.

冯科, 李劲松. 高斯光束非球面镜整形系统的设计［J］. 光电工程, 2013, 40(5): 127-132.

FENG K, LI J S. Design of aspherics lenses shaping system on Gaussian beam［J］. Opto-Electronic Engineering, 2013, 40(5): 127-132.(in Chinese)

[11] 陈怀新, 隋展, 陈祯培, 等. 采用液晶空间光调制器进行激光光束的空间整形［J］. 光学学报, 2001, 21(9): 1107-1111.

陈怀新, 隋展, 陈祯培, 等. 采用液晶空间光调制器进行激光光束的空间整形［J］. 光学学报, 2001, 21(9): 1107-1111.

CHEN H X, SUI ZH, CHEN ZH P, et al.. Laser beam shaping using liquid crystal spatial light modulator［J］. Acta Optica Sinica, 2001, 21(9): 1107-1111.(in Chinese)

[12] 林勇, 胡家升, 吴克难. 一种用于光束整形的衍射光学元件设计算法［J］. 光学学报, 2007, 27(9): 1682-1686.

林勇, 胡家升, 吴克难. 一种用于光束整形的衍射光学元件设计算法［J］. 光学学报, 2007, 27(9): 1682-1686.

LIN Y, HU J SH, WU K N. Algorithm for the design of diffractive optical elements for laser beam shaping［J］. Acta Optica Sinica, 2007, 27(9): 1682-1686.(in Chinese)

[13] 韩立, 徐莉, 张贺. 传导冷却半导体激光阵列温度均匀化研究［J］. 强激光与粒子束, 2017, 29(11): 111002.

韩立, 徐莉, 张贺. 传导冷却半导体激光阵列温度均匀化研究［J］. 强激光与粒子束, 2017, 29(11): 111002.

HAN L, XU L, ZHANG H. Study on temperature uniformity of conduction cooled semiconductor laser array［J］. High Power Laser and Particle Beams, 2017, 29(11): 111002.(in Chinese)

[14] 高瑀含, 安志勇, 李娜娜, 等. 高斯光束整形系统的光学设计［J］. 光学精密工程, 2011, 19(7): 1464-1471.

高瑀含, 安志勇, 李娜娜, 等. 高斯光束整形系统的光学设计［J］. 光学精密工程, 2011, 19(7): 1464-1471.

GAO Y H, AN ZH Y, LI N N, et al.. Optical design of Gaussian beam shaping［J］. Opt. Precision Eng., 2011, 19(7): 1464-1471. (in Chinese)

[15] RHODES P W, SHEALY D L. Refractive optical systems for irradiance redistribution of collimated radiation: their design and analysis［J］. Applied Optics, 1980, 19(20): 3545-3553.

RHODES P W, SHEALY D L. Refractive optical systems for irradiance redistribution of collimated radiation: their design and analysis［J］. Applied Optics, 1980, 19(20): 3545-3553.

[16] HOFFNAGLE J A, JEFFERSON C M. Design and performance of a refractive optical system that converts a Gaussian to a flattop beam［J］. Applied Optics, 2000, 39(30): 5488-5499.

HOFFNAGLE J A, JEFFERSON C M. Design and performance of a refractive optical system that converts a Gaussian to a flattop beam［J］. Applied Optics, 2000, 39(30): 5488-5499.

李党娟, 王佳超, 陈阳, 杨金亮, 吴新宇, 苏俊宏. 大功率长焦深高斯光束整形设计[J]. 光学精密工程, 2020, 28(10): 2129. LI Dang-juan, WANG Jia-chao, CHEN Yang, YANG Jin-liang, WU Xin-yu, SUN Jun-hong. Design of high power long-coke deep-Gaussian beam shaping system[J]. Optics and Precision Engineering, 2020, 28(10): 2129.

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