915 nm/974 nm单发射区半导体激光器光纤耦合模块设计

为了突破多单发射区半导体激光器光纤耦合模块设计过程中空间合束法遇到的合束功率及光功率密度无法上升的瓶颈, 得到多单发射区半导体激光器光纤耦合模块更优参数的光束输出, 同时完成单一激光器光纤耦合模块泵浦多种激光器的目标, 结合ZEMAX光学设计软件及Solidworks工程设计软件设计并制作了一种由6支、可输出2种波长分别为915 nm及974 nm的单发射区半导体激光器组成的光纤耦合模块。该模块的实现过程包括微透镜光束快慢轴整形、空间合束、波长合束、光路转向及聚焦, 最终耦合进数值孔径为0.22、光纤芯径为105 μm的普通光纤, 测试结果表明该模块光纤输出光功率达到了46 W, 2种波长均在光纤输出光束中检测到, 且光纤耦合效率高于83%。使用ANSYS软件对模块进行散热分析, 结果显示, 模块正常使用后最高温升至37 ℃, 在正常使用温度范围内, 表明模块的散热性能良好, 具备实际应用的可行性。

Abstract

A practical method of a high optical power density and high power fiber-coupled laser diode module based on six single-emitter semiconductor laser diodes at 915 nm/974 nm was demonstrated by ZEMAX software simulation and experiments. To obtain a high power and high optical power density laser beam, which included two wavelengths for pumping two kinds of solid lasers or fiber lasers by the same module, the optical reshaping, spatial multiplexing and wavelengths multiplexing were used in this module to combine six single emitters into a single beam. Then, an aspheric lens was used to couple the combined beam into an optical fiber. This module can produce more than 46 W output power with coupling efficiency of 83% from a standard multi-mode optical fiber with core diameter of 105 μm and numerical aperture(NA) of 0.22.

参考文献

[1] 王立军, 彭航宇, 张俊．大功率半导体激光合束进展［J］．中国光学, 2015, 8(4):517-534．

WANG L J, PENG H Y, ZHANG J. Advance on high power laser diode coupling ［J］. Chin. Opt., 2015, 8(4):517-534. (in Chinese)

[2] 马骁宇, 王俊, 刘素平. 国内大功率半导体激光器研究及应用现状［J］. 红外与激光工程, 2008, 37(2):189-194.

MA X Y, WANG J, LIU S P. Present situation of investigations and applications in high power semiconductor lasers ［J］. Infrared Laser Eng., 2008, 37(2):189-194. (in Chinese)

[3] 王立军, 宁永强, 秦莉, 等. 大功率半导体激光器研究进展［J］. 发光学报, 2015, 36(1):1-19.

WANG L J, NING Y Q, QIN L, et al.. Development of high power laser diode ［J］. Chin. J. Lumin., 2015, 36(1):1-19. (in Chinese)

[4] NI Y X, MA X Y, JING H Q, et al.. Finite element analysis of expansion-matched sub-mounts for high-power laser diodes packaging ［J］. J. Semicond., 2016, 37:064005.

[5] 张俊, 彭航宇, 王立军. 半导体激光合束技术及应用［J］. 红外与激光工程, 2012, 41(12):3193-3197.

ZHANG J, PENG H Y, WANG L J. High power laser diode beam combining technology and applications ［J］. Infrared Laser Eng., 2012, 41(12):3193-3197. (in Chinese)

[6] 孙舒娟, 郭林辉, 谭昊, 等. 半导体激光器波分复用合束技术研究［J］. 激光与光电子学进展, 2018, 55(2):020002.

SUN S J, GUO L H, TAN H, et al.. Progress on wavelength division multiplexing beam combining technology of diode lasers ［J］. Lasers Optoelecton. Prog., 2018, 55(2):020002. (in Chinese)

[7] 徐莉, 赵鑫, 李洋, 等. 基于波长复用技术的激光二极管光纤耦合方法［J］. 长春理工大学学报(自然科学版),2014, 37(5):1-3.

XU L, ZHAO X, LI Y, et al.. Fiber-coupled high power laser diode by wavelength multiplexing ［J］. J. Changchun Univ. Sci. Technol., 2014, 37(5):1-3. (in Chinese)

[8] WANG X, WANG C L, WU X, et al.. Researching the 915 nm high-power and high-brightness semiconductor laser single chip coupling module ［J］. J. Semicond., 2017, 38(2):024006.

[9] LEGGIO L, GALLEGO D C, GAWALI S B, et al.. System analysis of wavelength beam combining of high-power laser diode s for photoacoustic endoscopy ［J］. SPIE, 2016, 9888:988807.

[10] JIANG X C, LIU R, GAO Y Y, et al.. Packaging of wavelength stabilized 976 nm 100 W 105 μm NA 0.15 fiber coupled laser diodes ［J］. SPIE, 2016, 9730:97300I.

[11] 周泽鹏, 薄报学, 高欣, 等. 基于ZEMAX高功率半导体激光器光纤耦合设计［J］. 发光学报, 2013, 34(9):1208-1212.

ZHOU Z P, BO B X, GAO X, et al.. Fiber coupling design of high power semiconductor laser based on ZEMAX ［J］. Chin. J. Lumin., 2013, 34(9):1208-1212. (in Chinese)

刘翠翠, 井红旗, 倪羽茜, 王鑫, 吴霞, 马骁宇. 915 nm/974 nm单发射区半导体激光器光纤耦合模块设计[J]. 发光学报, 2018, 39(11): 1598. LIU Cui-cui, JING Hong-qi, NI Yu-xi, WANG Xin, WU Xia, MA Xiao-yu. Design of 915 nm/974 nm Single-emitter Laser Diode Fiber-coupled Module[J]. Chinese Journal of Luminescence, 2018, 39(11): 1598.

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