窄线宽准分子激光腔内棱镜扩束器的优化设计
[1] 张国威. 染料激光腔内双扩束棱镜系统的特性[J]. 光学学报, 1983, 3(7): 667~672
[2] F. J. Duarte. Multiple-return-pass beam divergence and the linewidth equation[J]. Appl. Opt., 2001, 40(18): 3038~3041
[3] F. J. Duarte. Solid-state multiple-prism grating dye-laser oscillators[J]. Appl. Opt., 1994, 33(18): 3857~3860
[4] 诸玉喜, 罗才雁. 四棱镜扩束染料激光的多线振荡[J]. 光学学报, 1993, 13(7): 642~648
[5] T. R. Loree, K. B. Butterfield, D. L. Barker. Spectral tuning of ArF and KrF discharge lasers[J]. Appl. Phys. Lett., 1978, 32(3): 171~173
[6] R. S. Hargrove, J. A. Paisner. Tunable efficient VUV generation using ArF-pumped SRS in H2[C]. Topical meeting on Excimer lasers, 1979, ThA6
[7] Rick Trebino. Achromatic N-prism beam expanders: optimal configurations[J]. Appl. Opt., 1985, 24(8): 1130~1138
[8] 楼祺洪, 徐捷, 傅淑芬 等. 脉冲放电气体激光器[M]. 北京: 科学出版社, 1993. 255~288
Lou Qihong, Xu Jie, Fu Shufeng et al.. Gas Laser with Pulsed Discharge[M]. Beijing: Science Press, 1993. 255~288
[9] 李红霞, 楼祺洪, 董景星 等. 准分子激光线宽压缩方法的研究[J]. 光学与光电子技术, 2004, 2(4): 44~47
Li Hongxia, Lou Qihong, Dong Jingxing et al.. Research on spectral-narrowing of excimer lasers[J]. Optics & Optoelectronic Technology, 2004, 2(4): 44~47
[10] 张海波, 楼祺洪, 周军 等. ArF准分子激光线宽压缩技术[J]. 激光与光电子学进展, 2009, 46(12): 46~51
[11] E. Loewen, D. Maystre, E. Popov et al.. Diffraction efficiency of echelles working in extremely high orders[J]. Appl. Opt., 1996, 35(10): 1700~1704
[12] J. R. M. Barr. Achromatic prism beam expanders[J]. Opt. Commun., 1984, 51(1): 41~46
[13] R. Gupta, J. H. Burnett, U. Griesmann et al.. Absolute refractive indices and thermal coefficients of fused silica and CaF2 near 193 nm[J]. Appl. Opt., 1998, 37(25): 5964~5968
[14] B. Rácz, Zs. Bor, S. Szatmári et al.. Comparative study of beam expanders used in nitrogen laser pumped dye lasers[J]. Opt. Commun., 1981, 36(5): 399~402
[15] Ch. Mühlig, W. Triebel, G. Tpfer et al.. Calcium fluoride for ArF laser lithography-characterization by in situ transmission and LIF measurements[C]. SPIE, 2003, 4932: 458~466
[16] J. H. Burnett, Z. H. Levine, E. L. Shirley. Intrinsic birefringence in calcium fluoride and barium fluoride[J]. Phys. Rev. B, 2001, 64(24): 241102
[17] J. H. Burnett, Z. H. Levine, E. L. Shirley et al.. Symmetry of spatial-dispersion-induced birefringence and its implications for CaF2 ultraviolet optics[J]. J. Microlith. Microfab. Microsyst., 2002, 1(3): 213~224
[18] 周军, 张海波, 赵宏明 等. 含光束整形与波长转动调谐的线宽压缩装置[P]. 中国专利, 101581866. 2010-12-29
Zhou Jun, Zhang Haibo, Zhao Hongming et al.. Line narrowing apparatus with beam shaping and rotational wavelength tuning[P]. China Patent, 101581866. 2010-12-29
[19] M. Born, E. Wolf, Principles of Optics[M]. 7th ed. Cambridge: Cambridge University Press, 1998. 446~460
张海波, 袁志军, 周军, 董景星, 魏运荣, 楼祺洪. 窄线宽准分子激光腔内棱镜扩束器的优化设计[J]. 中国激光, 2011, 38(11): 1102008. Zhang Haibo, Yuan Zhijun, Zhou Jun, Dong Jingxing, Wei Yunrong, Lou Qihong. Optimal Design of Prism Beam Expander in Line Narrowed Excimer Laser Cavity[J]. Chinese Journal of Lasers, 2011, 38(11): 1102008.