中国激光, 2011, 38 (11): 1102008, 网络出版: 2011-10-24   

窄线宽准分子激光腔内棱镜扩束器的优化设计

Optimal Design of Prism Beam Expander in Line Narrowed Excimer Laser Cavity
作者单位
1 中国科学院上海光学精密机械研究所, 上海市全固态激光器与应用技术实验室, 上海 201800
2 中国科学院研究生院, 北京 100049
摘要
棱镜扩束器(PBE)广泛用在准分子激光腔内光谱压窄系统中,可以有效降低光束发散角和系统内能量密度。为了实现窄线宽激光输出并降低腔内损耗,需要对棱镜扩束器的棱镜个数、单棱镜扩束倍数和棱镜顶角进行优化设计。根据棱镜扩束倍数的理论,数值分析了入射角、顶角和出射角对棱镜扩束倍数的影响,并在实验上很好地验证了扩束倍数与入射角的关系。此外,推导了激光器线宽压窄系统实现一定激光线宽输出所需的总棱镜扩束倍数。优化设计了扩束倍数M为13.3的氟化钙消色散棱镜扩束器,在此基础上,实现了0.915 pm的窄线宽ArF激光输出,实验结果与理论设计吻合。
Abstract
Prism beam expander (PBE) is widely used in the spectral narrowing module of excimer lasers. The beam divergence and fluence could be reduced by the prism beam expander. The prism number, magnification of single prism and apex angle of the PBE should be optimized to improve the efficiency of the laser. Based on the magnification theory of the prism, the impact of the incidence angle, apex angle and exit angle of the prism on magnification are analyzed by numerical simulation. The dependence of magnification on incidence angle is demonstrated experimentally. Furthermore, to achieve a given linewidth of the laser, the minimal magnification of the line narrowing module is deduced. In addition, CaF2 prism beam expander with magnification of 13.3 is designed. Finally, 0.915 pm linewidth ArF laser is obtained using the designed PBE. The experimental results agree with the theoretical analysis.
参考文献

[1] 张国威. 染料激光腔内双扩束棱镜系统的特性[J]. 光学学报, 1983, 3(7): 667~672

    Zhang Guowei. Performance of the two-prism beam expanding system in dye laser resonator[J]. Acta Optica Sinica, 1983, 3(7): 667~672

[2] F. J. Duarte. Multiple-return-pass beam divergence and the linewidth equation[J]. Appl. Opt., 2001, 40(18): 3038~3041

[3] F. J. Duarte. Solid-state multiple-prism grating dye-laser oscillators[J]. Appl. Opt., 1994, 33(18): 3857~3860

[4] 诸玉喜, 罗才雁. 四棱镜扩束染料激光的多线振荡[J]. 光学学报, 1993, 13(7): 642~648

    Chu Yuxi, Luo Caiyan. Multiline oscillation of pulsed dye laser with four-prism expander[J]. Acta Optica Sinica, 1993, 13(7): 642~648

[5] T. R. Loree, K. B. Butterfield, D. L. Barker. Spectral tuning of ArF and KrF discharge lasers[J]. Appl. Phys. Lett., 1978, 32(3): 171~173

[6] R. S. Hargrove, J. A. Paisner. Tunable efficient VUV generation using ArF-pumped SRS in H2[C]. Topical meeting on Excimer lasers, 1979, ThA6

[7] Rick Trebino. Achromatic N-prism beam expanders: optimal configurations[J]. Appl. Opt., 1985, 24(8): 1130~1138

[8] 楼祺洪, 徐捷, 傅淑芬 等. 脉冲放电气体激光器[M]. 北京: 科学出版社, 1993. 255~288

    Lou Qihong, Xu Jie, Fu Shufeng et al.. Gas Laser with Pulsed Discharge[M]. Beijing: Science Press, 1993. 255~288

[9] 李红霞, 楼祺洪, 董景星 等. 准分子激光线宽压缩方法的研究[J]. 光学与光电子技术, 2004, 2(4): 44~47

    Li Hongxia, Lou Qihong, Dong Jingxing et al.. Research on spectral-narrowing of excimer lasers[J]. Optics & Optoelectronic Technology, 2004, 2(4): 44~47

[10] 张海波, 楼祺洪, 周军 等. ArF准分子激光线宽压缩技术[J]. 激光与光电子学进展, 2009, 46(12): 46~51

    Zhang Haibo, Lou Qihong, Zhou Jun et al.. ArF excimer laser line narrowing technique[J]. Laser & Optoelectronics Progress, 2009, 46(12): 46~51

[11] E. Loewen, D. Maystre, E. Popov et al.. Diffraction efficiency of echelles working in extremely high orders[J]. Appl. Opt., 1996, 35(10): 1700~1704

[12] J. R. M. Barr. Achromatic prism beam expanders[J]. Opt. Commun., 1984, 51(1): 41~46

[13] R. Gupta, J. H. Burnett, U. Griesmann et al.. Absolute refractive indices and thermal coefficients of fused silica and CaF2 near 193 nm[J]. Appl. Opt., 1998, 37(25): 5964~5968

[14] B. Rácz, Zs. Bor, S. Szatmári et al.. Comparative study of beam expanders used in nitrogen laser pumped dye lasers[J]. Opt. Commun., 1981, 36(5): 399~402

[15] Ch. Mühlig, W. Triebel, G. Tpfer et al.. Calcium fluoride for ArF laser lithography-characterization by in situ transmission and LIF measurements[C]. SPIE, 2003, 4932: 458~466

[16] J. H. Burnett, Z. H. Levine, E. L. Shirley. Intrinsic birefringence in calcium fluoride and barium fluoride[J]. Phys. Rev. B, 2001, 64(24): 241102

[17] J. H. Burnett, Z. H. Levine, E. L. Shirley et al.. Symmetry of spatial-dispersion-induced birefringence and its implications for CaF2 ultraviolet optics[J]. J. Microlith. Microfab. Microsyst., 2002, 1(3): 213~224

[18] 周军, 张海波, 赵宏明 等. 含光束整形与波长转动调谐的线宽压缩装置[P]. 中国专利, 101581866. 2010-12-29

    Zhou Jun, Zhang Haibo, Zhao Hongming et al.. Line narrowing apparatus with beam shaping and rotational wavelength tuning[P]. China Patent, 101581866. 2010-12-29

[19] M. Born, E. Wolf, Principles of Optics[M]. 7th ed. Cambridge: Cambridge University Press, 1998. 446~460

张海波, 袁志军, 周军, 董景星, 魏运荣, 楼祺洪. 窄线宽准分子激光腔内棱镜扩束器的优化设计[J]. 中国激光, 2011, 38(11): 1102008. Zhang Haibo, Yuan Zhijun, Zhou Jun, Dong Jingxing, Wei Yunrong, Lou Qihong. Optimal Design of Prism Beam Expander in Line Narrowed Excimer Laser Cavity[J]. Chinese Journal of Lasers, 2011, 38(11): 1102008.

本文已被 5 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!