飞秒激光作用下金膜的微观特性变化

崔云; 张晗宇; 赵元安; 晋云霞; 朱美萍; 邵建达

doi:doi:10.3788/CJL201946.0203001

中国激光, 2019, 46 (2): 0203001, 网络出版: 2019-05-09

飞秒激光作用下金膜的微观特性变化下载： 1391次

Microscopic Properties Changes of Au Film Under Action of Femtosecond Laser

崔云 ^*张晗宇赵元安晋云霞朱美萍邵建达

作者单位

中国科学院上海光学精密机械研究所强激光材料重点实验室薄膜光学实验室, 上海 201800

图 & 表

图 1. 激光损伤测试实验装置示意图

Fig. 1. Schematic of experimental setup for laser damage test

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图 2. 微光束发射定位装置示意图

Fig. 2. Schematic of micro beam emission positioning device

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图 3. 标记点的损伤形貌。(a)标记点俯视图;(b)标记点表面形貌的局部放大;(c)标记点局部FIB切割截面形貌

Fig. 3. Damage topography of mark point. (a) Top-view of mark point; (b) partial enlarged surface morphology of mark point; (c) cross-section view of mark point by FIB milling

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图 4. 损伤形貌。(a)目标点的损伤全图;(b) 6个观测点在损伤斑半径方向上的位置;(c) 6个位置的高分辨SEM图

Fig. 4. Damage topography. (a) Damage view of target point; (b) positions of six observation points along radius of damage area; (c) high resolution SEM images of six positions

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图 5. 使用FIB切割获得的截面形貌。(a)位置2;(b)位置3;(c)位置4

Fig. 5. Cross-section topography obtained by FIB milling. (a) Position 2; (b) position 3; (c) position 4

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图 6. 表面粗糙度。(a)位置4;(b)位置6

Fig. 6. Surface roughness. (a) Position 4; (b) position 6

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图 7. 晶粒尺寸。(a)位置3;(b)位置4

Fig. 7. Grain size. (a) Position 3; (b) position 4

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图 8. Au膜上3个非激光辐照微区的XRD衍射谱

Fig. 8. XRD diffraction spectra of three micro-regions in Au film without laser irradiation

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图 9. 非辐照点和激光辐照点的XRD衍射谱,插图为(111)峰位的放大图

Fig. 9. XRD diffraction spectra of micro-regions without laser irradiation and with laser irradiation, the insert figure is enlarged view of (111) peak

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表 1Au膜在800 nm飞秒激光辐照下的LIDT

Table1. LIDT of Au film under the irradiation of 800 nm femtosecond laser

Sample type	Thickness /nm	Test method	Laser wavelength /nm	Pulse width /fs	Beam size /μm	LIDT /(J·cm^-2)
Au film	130	1-on-1	800	300	500	0.61

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崔云, 张晗宇, 赵元安, 晋云霞, 朱美萍, 邵建达. 飞秒激光作用下金膜的微观特性变化[J]. 中国激光, 2019, 46(2): 0203001. Yun Cui, Hanyu Zhang, Yuan'an Zhao, Yunxia Jin, Meiping Zhu, Jianda Shao. Microscopic Properties Changes of Au Film Under Action of Femtosecond Laser[J]. Chinese Journal of Lasers, 2019, 46(2): 0203001.

飞秒激光作用下金膜的微观特性变化下载： 1391次

图 1. 激光损伤测试实验装置示意图

Fig. 1. Schematic of experimental setup for laser damage test

图 2. 微光束发射定位装置示意图

Fig. 2. Schematic of micro beam emission positioning device

图 3. 标记点的损伤形貌。(a)标记点俯视图;(b)标记点表面形貌的局部放大;(c)标记点局部FIB切割截面形貌

Fig. 3. Damage topography of mark point. (a) Top-view of mark point; (b) partial enlarged surface morphology of mark point; (c) cross-section view of mark point by FIB milling

图 4. 损伤形貌。(a)目标点的损伤全图;(b) 6个观测点在损伤斑半径方向上的位置;(c) 6个位置的高分辨SEM图

Fig. 4. Damage topography. (a) Damage view of target point; (b) positions of six observation points along radius of damage area; (c) high resolution SEM images of six positions

图 5. 使用FIB切割获得的截面形貌。(a)位置2;(b)位置3;(c)位置4

Fig. 5. Cross-section topography obtained by FIB milling. (a) Position 2; (b) position 3; (c) position 4

图 6. 表面粗糙度。(a)位置4;(b)位置6

Fig. 6. Surface roughness. (a) Position 4; (b) position 6

图 7. 晶粒尺寸。(a)位置3;(b)位置4

Fig. 7. Grain size. (a) Position 3; (b) position 4

图 8. Au膜上3个非激光辐照微区的XRD衍射谱

Fig. 8. XRD diffraction spectra of three micro-regions in Au film without laser irradiation

图 9. 非辐照点和激光辐照点的XRD衍射谱,插图为(111)峰位的放大图

Fig. 9. XRD diffraction spectra of micro-regions without laser irradiation and with laser irradiation, the insert figure is enlarged view of (111) peak

表 1Au膜在800 nm飞秒激光辐照下的LIDT

Table1. LIDT of Au film under the irradiation of 800 nm femtosecond laser

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飞秒激光作用下金膜的微观特性变化 下载： 1391次

图 1. 激光损伤测试实验装置示意图

Fig. 1. Schematic of experimental setup for laser damage test

图 2. 微光束发射定位装置示意图

Fig. 2. Schematic of micro beam emission positioning device

图 3. 标记点的损伤形貌。(a)标记点俯视图;(b)标记点表面形貌的局部放大;(c)标记点局部FIB切割截面形貌

Fig. 3. Damage topography of mark point. (a) Top-view of mark point; (b) partial enlarged surface morphology of mark point; (c) cross-section view of mark point by FIB milling

图 4. 损伤形貌。(a)目标点的损伤全图;(b) 6个观测点在损伤斑半径方向上的位置;(c) 6个位置的高分辨SEM图

Fig. 4. Damage topography. (a) Damage view of target point; (b) positions of six observation points along radius of damage area; (c) high resolution SEM images of six positions

图 5. 使用FIB切割获得的截面形貌。(a)位置2;(b)位置3;(c)位置4

Fig. 5. Cross-section topography obtained by FIB milling. (a) Position 2; (b) position 3; (c) position 4

图 6. 表面粗糙度。(a)位置4;(b)位置6

Fig. 6. Surface roughness. (a) Position 4; (b) position 6

图 7. 晶粒尺寸。(a)位置3;(b)位置4

Fig. 7. Grain size. (a) Position 3; (b) position 4

图 8. Au膜上3个非激光辐照微区的XRD衍射谱

Fig. 8. XRD diffraction spectra of three micro-regions in Au film without laser irradiation

图 9. 非辐照点和激光辐照点的XRD衍射谱,插图为(111)峰位的放大图

Fig. 9. XRD diffraction spectra of micro-regions without laser irradiation and with laser irradiation, the insert figure is enlarged view of (111) peak

表 1Au膜在800 nm飞秒激光辐照下的LIDT

Table1. LIDT of Au film under the irradiation of 800 nm femtosecond laser

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飞秒激光作用下金膜的微观特性变化下载： 1391次