拉曼光谱是研究化学气相沉积（CVD）金刚石最有效的手段之一。对不同晶粒尺寸的CVD金刚石膜进行了拉曼光谱分析。紫外拉曼光谱的检验表明，紫外光激发的拉曼光谱有效抑制了sp2碳的散射和荧光背景；1140 cm-1峰出现在可见光拉曼光谱的原因是反聚乙炔的增多和sp2碳散射的增强。可见光拉曼光谱检测发现随着晶粒的减小，1140 cm-1和1460 cm-1峰强度增强，金刚石特征峰强度降低同时其半峰全宽（FWHM）变宽，薄膜中sp3碳含量减少；基体材料由硬质合金变为微米金刚石后，金刚石特征峰强度显著增加，FWHM有较大减小，非sp3碳成分含量明显减少。

Raman spectroscopy for studying of chemical vapor deposition (CVD) diamond is one of the most effective means. CVD diamond films with different grain sizes are analyzed by Raman spectrum. Ultraviolet Raman spectrum test shows that ultraviolet stimulated Raman spectrum effectively restrains the scattering of sp2 carbon and the non-diamond fluorescent background. The presence of 1140 cm-1 peak in the visible Raman spectrum attributed to the increase in quantity of trans-polyacetylene and the intensity enhancement of sp2 carbon scattering. Through the visible Raman spectrum detection, it is found that with the decrease of grain size, the intensity of 1140 cm-1 peak and 1460 cm-1 peak unceasingly strengthens, the intensity of the diamond peak constantly lowers, and the full width at half maximum (FWHM) of diamond peak continually broadens. The content of sp3 carbon decreases in the film. When micron diamond replaces cemented carbide as substrate material, the FHWM of diamond peak has greater decrease, and its intensity increases significantly. Impurity components in the films reduce significantly.