Design of Pd/B<sub>4</sub>C aperiodic multilayers for 8–12  nm region with flat reflectivity profile

Yiwen Wang; Qiushi Huang; Qiang Yi; Li Jiang; Zhong Zhang; Zhanshan Wang

doi:doi:10.3788/COL201614.073101

Chinese Optics Letters, 2016, 14 (7): 073101, Published Online: Aug. 3, 2018

Design of Pd/B₄C aperiodic multilayers for 8–12 nm region with flat reflectivity profile

Yiwen Wang ¹Qiushi Huang ¹Qiang Yi ^1,2Li Jiang ¹Zhong Zhang ¹Zhanshan Wang ^1,*

Author Affiliations

¹ Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

² Institute of Nuclear Physics and Chemistry CAEP, Mianyang 621900, China

Suppl. Mat.

Yiwen Wang, Qiushi Huang, Qiang Yi, Li Jiang, Zhong Zhang, Zhanshan Wang. Design of Pd/B₄C aperiodic multilayers for 8–12 nm region with flat reflectivity profile[J]. Chinese Optics Letters, 2016, 14(7): 073101.