Chinese Optics Letters, 2016, 14 (7): 073101, Published Online: Aug. 3, 2018   

Design of Pd/B4C aperiodic multilayers for 8–12  nm region with flat reflectivity profile

Author Affiliations
1 Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
2 Institute of Nuclear Physics and Chemistry CAEP, Mianyang 621900, China
Abstract
The Pd/B4C multilayer is a promising candidate for high reflectance mirrors operating in the 8–12 nm extreme ultraviolet wavelength region. To extend the working bandwidth beyond the L-edge of silcon, we theoretically design broadband Pd/B4C multilayers. We discuss the influence of the desired reflectance of the plateau, number of bilayers, and the real structural parameters, including the interface widths, layer density, and thickness deviation, on the reflectivity profile. Assuming the interface width to be 0.6 nm, we design aperiodic multilayers for broad wavebands of 9.0–10.0, 8.5–10.5, and 8.0–11.0 nm, with average reflectivities of 3.1%, 5.0%, and 9.5%, respectively.

Yiwen Wang, Qiushi Huang, Qiang Yi, Li Jiang, Zhong Zhang, Zhanshan Wang. Design of Pd/B4C aperiodic multilayers for 8–12  nm region with flat reflectivity profile[J]. Chinese Optics Letters, 2016, 14(7): 073101.

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