Chinese Optics Letters, 2016, 14 (7): 073101, Published Online: Aug. 3, 2018
Design of Pd/B4C aperiodic multilayers for 8–12 nm region with flat reflectivity profile
310.4165 Multilayer design 230.4170 Multilayers 340.7480 X-rays, soft x-rays, extreme ultraviolet (EUV) 350.1270 Astronomy and astrophysics
Abstract
The Pd / B 4 C multilayer is a promising candidate for high reflectance mirrors operating in the 8–12 nm extreme ultraviolet wavelength region. To extend the working bandwidth beyond the L-edge of silcon, we theoretically design broadband Pd / B 4 C multilayers. We discuss the influence of the desired reflectance of the plateau, number of bilayers, and the real structural parameters, including the interface widths, layer density, and thickness deviation, on the reflectivity profile. Assuming the interface width to be 0.6 nm, we design aperiodic multilayers for broad wavebands of 9.0–10.0, 8.5–10.5, and 8.0–11.0 nm, with average reflectivities of 3.1%, 5.0%, and 9.5%, respectively.
Yiwen Wang, Qiushi Huang, Qiang Yi, Li Jiang, Zhong Zhang, Zhanshan Wang. Design of Pd/B4C aperiodic multilayers for 8–12 nm region with flat reflectivity profile[J]. Chinese Optics Letters, 2016, 14(7): 073101.