Chinese Optics Letters, 2021, 19 (4): 041301, Published Online: Feb. 4, 2021   

Electro-optic polymer ring resonator modulators [Invited] Download: 812次

Feng Qiu 1,2,*Yu Han 3
Author Affiliations
1 Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
2 Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China
3 Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan
Figures & Tables

Fig. 1. (a) Schematic diagram representation of a ring resonator (top images: propagated light field of non-resonant λλi and resonant condition λ=λi); (b) resonant spectrum of a ring modulator: the resonant peak λi will have a shift Δλi under the applied voltage.

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Fig. 2. (a) Cross section and (b) schematic of the ring modulators with EO polymer as the waveguide core.

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Fig. 3. (a) Designed cross section of the TiO2 core/EO polymer ring resonator waveguide; (b) simulated TM mode intensity distribution; (c) top view scanning electron microscopy (SEM) image of the TiO2 ring structure (left: view of cross section, right: view of bus-ring gap). Adapted with permission from Ref. [11].

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Fig. 4. Conceptual representation of an EO polymer/Si slot waveguide ring resonator modulator: the applied voltage drops only across the slot filled with the EO polymer, allowing a strong overlap between the electric and optic fields.

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Fig. 5. (a) Cross section of the designed horizontal slot waveguide, (b) the calculated TM mode distribution, indicating a highly concentrated optical field within the EO polymer, (c) calculated electric-field distribution in the vertical-direction, and (d) device SEM image. Adapted with permission from Ref. [39].

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Fig. 6. (a) Schematic of the etching-free ring resonator modulator, and (b) the fitted high resolution spectra of one resonant peak at 1549.57 nm and its spectral shift with a range of bias voltages. The shift of the resonance peak linearly fitted with the bias voltages (inset). Adapted with permission from Ref. [20].

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Fig. 7. Schematic of the designed athermal ring resonator modulator: top figures are the high-frequency response (10 MHz) at different temperatures. Adapted with permission from Ref. [40].

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Feng Qiu, Yu Han. Electro-optic polymer ring resonator modulators [Invited][J]. Chinese Optics Letters, 2021, 19(4): 041301.

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