Nanowire-assisted microcavity in a photonic crystal waveguide and the enabled high-efficiency optical frequency conversions Download: 636次
1. INTRODUCTION
Semiconductor nanowires (NWs) have attracted intense research for constructing miniaturized nanophotonic and optoelectronic devices, including passive waveguides and resonators [13" target="_self" style="display: inline;">–
Planar photonic crystal (PPC) fabricated on dielectric slabs is well recognized as one of the important chip-integrated architectures. Leveraging their unique photonic structures, light–matter interactions and light wave propagations in PPC waveguides or cavities could be controlled effectively in a spatial scale of subwavelength, which is comparable to the thickness of NWs. Recently, a number of works have reported on the integration of NWs with PPC waveguides and nanocavities, which realize significantly enhanced light–NW couplings [18,20–
In this article, we report efficiently enhanced light–NW couplings by integrating an InP NW onto a standard silicon PPC waveguide, as schematically shown in Figs.
Fig. 1. (a), (b) Schematic representations of the hybrid structure of an NW and a PPC waveguide; (c) operation principle of the optical frequency upconversion processes (SHG and SFG) with the enhanced light–NW coupling by the NW-induced cavity.
2. HYBRID STRUCTURE OF THE NW AND PPC WAVEGUIDE
The employed PPC waveguide is formed by missing a line of air holes in a triangle-lattice PPC slab. The PPC lattice constant is and the air-hole radius is . The two nearest neighbor air-hole rows surrounding the waveguide are moved away from the line defect by 60 nm. Note this shift of air holes is not necessary in forming cavities in the hybrid NW–PPC waveguide, which is confirmed by further simulations. The PPC waveguide is fabricated in a silicon-on-insulator substrate with a 220 nm thick top silicon slab with the combinations of electron beam lithography and inductively coupled plasmon etching. After those, wet etching is employed to undercut the bottom silicon oxide layer to realize an air-suspended PPC waveguide. To facilitate the light coupling of the PPC waveguide, it is connected by silicon ridge waveguides at the two ends, which are then terminated by inverse tapers and embedded in polymer butt couplers to provide a coupling loss of 5 dB with an optical-lensed fiber [25].
To integrate the InP NW onto the PPC waveguide, a single NW is picked up from the vertically grown NW cluster using a tungsten probe, which is grown on a silicon substrate in a horizontal flow atmospheric pressure metal–organic vapor phase epitaxy system [26]. With the assistance of a high-resolution motorized stage, the NW is dropped onto the pattern of the PPC waveguide from the tungsten probe. To further align the NW with the line defect of the PPC waveguide, an atomic force microscope (AFM)-assisted manipulation technique is exploited. The location of the NW with respect to the PPC waveguide is examined first with a full AFM image. Then the NW is pushed accordingly to align onto the line defect using the AFM probe. Figure
Fig. 2. (a) SEM image of the fabricated device, showing the precise alignment of the NW with the line defect of the PPC waveguide; (b) normalized transmission spectra of the PPC waveguide before and after the integration of the NW, where the asterisks indicate the locations of the resonance modes of the NW-induced PPC cavity; (c) transmission spectra around the resonant mode at 1509 nm when the input laser has different powers of 5 mW (blue dots), 10 mW (red dots), and 15 mW (green dots). Black lines are fitting curves with Fano-type line shapes.
To characterize the perturbation of the NW on the transmission properties of the PPC waveguide, transmission spectra of the PPC waveguide before and after the integration of the NW are measured, as shown in Fig.
From the bare PPC waveguide, a transmission band in the wavelength range between 1515 and 1560 nm is obtained. After the integration of the NW, the transmission spectrum is subject to significant modifications, indicating the effective coupling between the NW and the PPC waveguide. The transmission band presented in the bare PPC waveguide becomes a transmission valley, and two broad peaks are observed around the wavelengths of 1506 and 1565 nm, which have several transmission dips. These features could be explained by the formations of microcavities on the hybrid NW–waveguide relying on the Fabry–Perot (FP) oscillations and the photonic bandgap of the PPC [20,28,31].
As shown in Fig.
Besides the FP cavity formed by the optical reflections at the two ends of the NW-covered waveguide region, the NW also perturbs the dispersion band of the guiding mode in the PPC waveguide to have lower optical frequencies, as discussed in Fig.
Fig. 3. (a) Band diagram of the odd (upper) and even (lower) guiding modes in the PPC waveguides with (red square) and without (black square) the NW; (b) mode distributions of the even and odd resonant modes at different orders calculated from an NW-integrated PPC waveguide. The arrows indicate that the resonant modes arise from the localizations of the corresponding odd and even transmission bands of the NW-integrated PPC waveguide.
Resonance properties of the above-obtained modes at the transmission dips are further verified by silicon’s thermal-optic effect. Because of the two-photon absorption effect, a telecom band light with a high power transmitted through silicon would yield thermal heating, which modifies silicon’s refractive index via the thermal-optic effect. For the NW-induced resonant modes on the PPC waveguide, relying on the high factors, the incident on-resonance light could heat the cavity effectively, and the resonant wavelength would be redshifted subsequently due to the increased refractive index. Figure
3. SIMULATION OF THE RESONANT MODES
To further reveal the formation mechanisms of the NW-induced cavities, we carry out the simulations of the dispersion diagram for the transverse electric (TE) modes of PPC waveguides with and without NWs separately, as shown in Fig.
To confirm that, we numerically solve the resonant modes of the fabricated device using a finite-element technique. The distributions of the () and () components of the modes’ electric fields are displayed in Fig.
Comparing these simulation results with the above experiment results, though their resonant wavelengths cannot match correspondingly, the even and odd resonant modes separated by a large wavelength range (about 50 nm) are observed experimentally. And the FSR for the even (odd) resonant modes obtained in the experiments are similar as those calculated in the simulated resonant modes. In the simulation, the FSRs for the even resonant modes are 2.2 and 1.9 nm, which are 2.4 and 2.8 nm in the experiment, respectively. For the odd resonant modes, the FSRs are 4.6 and 4.8 nm obtained in the simulation and experiment, respectively. Determined by the dispersion properties of the even and odd transmission bands of the NW-integrated PPC waveguide, the FSR of the even resonant modes has a smaller wavelength difference than that of the odd resonant modes.
4. EXPERIMENTAL RESULTS OF SHG AND SFG
To illustrate the effectively enhanced light–NW coupling in the NW–PPC waveguide, we then test different optical frequency upconversion processes in the hybrid structure, including SHGs and SFGs. In III–V compound semiconductor NWs, such as InP and GaAs, second-order nonlinear optical properties are allowed due to the absence of central inversion symmetry in the crystal structure. Optical frequency upconversion (SHGs and SFGs) and downconversion processes enabled by NWs’ second-order nonlinearity are intriguing for nonlinear optical nanoscopy [34,35], nanoscale light sources [9], and optical autocorrelators [15]. However, limited by the weak light–matter coupling [36], most of the previous studies about SHGs in NWs have to be implemented using pulsed lasers with high peak powers (), hindering their device applications. Also, because of the essential pump with pulsed lasers, SFGs in NWs were seldom reported, which require precise and complex synchronization of two laser pulses.
Here, in the fabricated hybrid NW–PPC waveguide, high-efficiency SHGs and SFGs are realized with pumps of CW lasers in the power levels of tens of microwatts. It is the result of the effective light–NW couplings enabled by NW-induced resonant modes on the PPC waveguide. The on-resonance light would circulate in the NW for a long time (; is the resonant frequency). In addition, as demonstrated in the above mode simulations, the mode field largely overlaps with the NW. In the experiments, CW narrowband lasers with tunable wavelengths are utilized to excite the frequency upconversion signals, which are tuned to be on-resonance with the resonant modes induced by the NW. Since the resonant modes are in the telecom band, the enhanced SHG and SFG signals are expected to be in the wavelength range between 750 and 800 nm. It is impossible to examine them from their direct transmissions along the PPC waveguide considering silicon’s strong optical absorption. We therefore monitor them by collecting the vertical scattering signals from the NW region using a home-built vertical microscope with an objective lens (, with a numerical aperture of 0.42). The pump lasers are scattered by the NW as well, which would be filtered out by a short-pass dichroic mirror. The finally left frequency upconversion signals are examined by a spectrometer mounted with a cooled silicon camera.
With a CW laser at the wavelength of 1509.0 nm (wavelength of one of the NW-induced resonance modes) coupled into the hybrid NW–PPC waveguide, the acquired spectrum of the scattered frequency upconversion signal is shown in Fig.
Fig. 4. (a) Spectrum of SHG from the vertical scattering signal of the NW–PPC waveguide with the pump of a 1509.0 nm laser; (b) log-log plot of the SHG powers and pump powers fitted by a line with a slope of 2.08; (c) measured SHG powers when the pump laser is scanned over the wavelength range of 1500–1600 nm, where the linear transmission spectrum of the pump laser is shown as well for cross-reference; (d) polarization property of the scattered SHG signal, where the polar angle is defined with respect to the long axis of the NW.
To further verify the resonantly enhanced SHG, the wavelength of the CW laser is scanned from 1500 to 1600 nm, and the corresponding scattered SHG signals are recorded, as shown by the blue curve in Fig.
In previous works about NW SHGs, the measurements were carried out in a configuration with normal illumination and normal collection. Dependences of NW SHGs on the laser polarizations and the signal collection polarizations are normally studied, which facilitates the understandings of light–NW interactions and NW crystal structures [37,38]. In this NW-PPC waveguide experiment, the pump laser is side-launched from the PPC waveguide, which then excites the NW SHG via the evanescent field of the NW-induced resonant modes. Hence, the light–NW interaction is governed by the near field of the resonant mode, which would not be modified by the polarization direction of the pump laser. The laser polarization only changes its coupling efficiency to the guiding mode of the PPC waveguide. We therefore only study the polarization properties of the scattered SHG signal from the NW–PPC waveguide by placing a polarizer in the signal collection path. The varied intensities of the scattered SHG signal polarized along different directions are monitored using the spectrometer. Note the employed grating of the monochromator (Princeton Instruments SP-2558, with a grating of 150 G/mm at 800 nm) has almost no difference for the s- and p-polarized light at the wavelength around 750 nm. The results acquired from the spectrometer could reveal the real polarization properties of the scattered SHG signal. The measured result is displayed in Fig.
This polarization property could be explained well by the depolarization effect of the electric field inside the NW [32,33]. Under the quasi-static approximation, because the NW diameter is smaller than the SHG wavelength and there is a large refractive index difference between NW and air, the electric field perpendicular to the long axis of the NW will be attenuated by a factor of . Here, is the refractive index of the InP NW, which is about 3.47 around the SHG wavelength. The SHG radiation could be simply regarded as dipole radiations driven by second-order nonlinear polarizations () oscillating at the frequency of SHG (). The component of perpendicular to the NW’s long axis is reduced by a factor of 0.153. The SHG signal radiated by this component polarizes perpendicularly to the NW’s long axis, and the power is attenuated by a factor of 0.0234. In contrast, the parallel component of is not modified by the depolarization effect because the NW length is much larger than the optical wavelength. The SHG radiated by this component is not reduced either, which polarizes along the NW’s long axis. We defined the collected SHG powers polarized parallel and perpendicularly to the NW’s long axis as and . The theoretical anisotropic ratio is calculated as 0.954. Estimated from the experimental data, the anisotropic ratio is about 0.934, which is consistent with the theoretical calculation. The fitting curve in Fig.
The successful excitation of SHG with a low-power CW laser in the NW–PPC waveguide indicates it is convenient to implement other second-order nonlinear processes leveraging the exemption of synchronization of multiple pulsed lasers [39]. To carry that out, we employ two CW tunable narrowband lasers ( and ) simultaneously as the pumps, which are incident onto the PPC waveguide via the two end couplers separately, as schematically shown in Fig.
Fig. 5. (a) Spectrum of the scattered frequency upconversion signals pumped by two on-resonance lasers at 1509.0 and 1554.8 nm, showing SHG and SFG signals; (b) log-log plot of the SFG powers and pump powers fitted by a line with a slope of 2.03; (c) measured SFG powers with one pump laser fixed at 1509.0 nm and the other pump laser scanned across 1540–1570 nm, where the linear transmission spectrum of the pump laser is shown as well for cross-reference; (d) polarization properties of SHG and SFG signals with respect to the long axis of the NW.
The possibility of SFG pumped by two low-power CW lasers is the result of the effective light–NW coupling endowed by the NW-induced resonant modes at 1509.0 and 1554.8 nm. It could be proved by examining the dependence of the SFG on the pump wavelength. We fix the wavelength of (1509.0 nm), and scan the wavelength of over a range between 1540 and 1570 nm. The SFG powers are recorded for each wavelength of , as shown by the blue curve of Fig.
5. CONCLUSIONS
In conclusion, by integrating an InP NW onto a silicon PPC waveguide, effective light–NW interactions are realized by forming resonant modes with factors exceeding , which are illustrated by the NW’s effective SHGs and SFGs pumped by CW lasers in the power levels of tens of microwatts. Combined with the calculations of the band diagram of the PPC waveguide with and without NW, the formed cavities are attributed to the lowered transmission band by the NW integration. By comparing the SHG signals pumped with on-resonance and off-resonance lasers, a cavity enhancement factor of 112 is obtained, indicating the strongly enhanced light–NW coupling in the NW-induced PPC cavity. The effective light–NW couplings in the hybrid NW-PPC waveguide not only provide a strategy to design on-chip microcavities with the possibility of postprocessing, but also present the potential to expand functionalities on silicon or silicon nitride chips with the assistance of NW’s active attributes, such as lasers, photodetectors, and modulators. While the adapted AFM manipulation technique has low yield for NW integration, there are two possible strategies for large-scale NW-integrated photonic devices based on the well-developed nanofabrication and NW growth techniques. (1) NWs are first grown on silicon or silicon nitride wafers, which are used for fabricating a PPC waveguide. The hybrid structures are then realized by designing and fabricating the PPC waveguides around the pre-growth NWs. (2) On the pre-fabricated silicon or silicon nitride PPC waveguide, the NWs are grown precisely in situ on the patterns using the selective-area growth technique [40].
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Article Outline
Linpeng Gu, Liang Fang, Qingchen Yuan, Xuetao Gan, Hao Yang, Xutao Zhang, Juntao Li, Hanlin Fang, Vladislav Khayrudinov, Harri Lipsanen, Zhipei Sun, Jianlin Zhao. Nanowire-assisted microcavity in a photonic crystal waveguide and the enabled high-efficiency optical frequency conversions[J]. Photonics Research, 2020, 8(11): 11001734.