一种基于平板横向剪切干涉的角位移测量方法

郑德锋; 王向朝

中国激光, 2007, 34 (8): 1125, 网络出版: 2007-09-05

一种基于平板横向剪切干涉的角位移测量方法

Angular Displacement Measurement Based on Lateral Shearing Interferometer Using Plane-Parallel Plate

论文大纲

郑德锋 ^1,2,*王向朝 ¹

作者单位

¹ 中国科学院上海光学精密机械研究所信息光学实验室, 上海 201800

² 中国科学院研究生院, 北京 100039

激光技术角位移测量剪切干涉平行平板 laser technique angular displacement measurement shearing interference plane-parallel plate

摘要

在一种已有的角位移干涉测量技术的基础上,提出一种改进的角位移测量方法。通过选择合适的初始入射角,使从平板前后表面反射的两光束实现剪切干涉。采用一维位置探测器测量光束经透镜会聚后在探测器光敏面上的光点偏移量。根据干涉信号的相位和光点偏移量可以计算出被测物体的角位移。在该测量方案中,引入的一平面反射镜与被测物体的反射面形成光程差放大系统,提高了角位移测量灵敏度。分析了初始入射角对剪切比的影响,并讨论了基于该方案的角位移测量精度。实验结果表明,基于该技术的角位移重复测量精度达到10-8 rad数量级。

Abstract

An improved method for measuring angular displacement is proposed based on an existent measurement technique. The choice of proper initial angle of incidence makes a lateral shearing interference easy to realize between the two beams reflected from the front and back surfaces of a plane-parallel plate. One-dimensional position sensitive detector is used to measure the offset of the light spot focused upon the photo sensitive surface of the detector by a lens. According to the interference signal′s phase and light spot′s offset, the angular displacement is measured. In this optical configuration, the use of a reflecting mirror increases the optical path difference in the plane-parallel plate, which improves the sensitivity of angular displacement measurement. Finally, the influence of the initial angle of incidence on the ratio of shear is analyzed and the measurement accuracy based on this method is discussed. The experimental results show the improved parallel plate interferometer can achieve a measurement repeatability of 10-8 rad order of magnitude.

参考文献

[1] . S. Huang, S. Kiyono, O. Kamada. Angle measurement based on the internal reflection effect: a new method[J]. Appt. Opt., 1992, 31(28): 6047-6055.

[2] . Filatov, D. P. Loukianov, R. Probst. Dynamic angle measurement by means of a ring laser[J]. Metrologia, 1997, 34(4): 343-351.

[3] . Torroba, A. A. Tagliaferri. Precision small angle measurements with a digital Moiré technique[J]. Opt. Commun., 1998, 149(1): 213-216.

[4] . R. Yoder, J. E. Schlesinger, J. L. Chickvary. Active annular-beam laser autocollimator system[J]. Appl. Opt., 1975, 14(8): 1890-1895.

[5] . K. Ilev. Fiber-optic autocollimation refractometer[J]. Opt. Commun., 1995, 119: 513-516.

[6] . Ikram, G. Hussain. Michelson interferometer for precision angle measurement[J]. Appl. Opt., 1999, 38(1): 113-120.

[7] . H. Zhang, C. H. Meng. A linear/angular interferometer capable of measuring large angular motion[J]. Meas. Sci. Technol., 1999, 10: 1247-1253.

[8] . Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement[J]. Opt. Eng., 2004, 43(12): 3008-3013.

[9] Zheng Defeng, Wang Xiangzhao. Optimum design of parallel plate interferometer for angular displacement measurement [J]. Chinese J. Lasers, 2007, 34(3):422～426
郑德锋,王向朝. 平行平板角位移干涉测量仪的优化设计[J]. 中国激光, 2007, 34(3):422～426

[10] Yingming Liu, Xiangzhao Wang, Xuefeng Wang. Study on silicon micro-resonators by using a novel optical excitation and detection apparatus [J]. Chin. Opt. Lett., 2006, 4(5):309～310

[11] Wang Xuefeng, Wang Xiangzhao, Qian Feng et al.. Laser diode interferometer used to measure displacements in large range with a nanometer accuracy [J]. Chinese J. Lasers, 2001, A28(5):455～458
王学锋,王向朝,钱锋等. 用于纳米精度大范围位移测量的半导体激光干涉仪[J]. 中国激光, 2001, A28(5):455～458

[12] . Sasaki, K.Takahashi. Sinusoidal phase modulating interferometer using optical fibers for displacement measurement[J]. Appl. Opt., 1988, 27(19): 4139-4142.

[13] . Sasaki, H. Okazaki. Analysis of measurement accuracy in sinusoidal phase modulating interferometry[J]. Appl. Opt., 1986, 25(18): 3152-3158.

郑德锋, 王向朝. 一种基于平板横向剪切干涉的角位移测量方法[J]. 中国激光, 2007, 34(8): 1125. 郑德锋, 王向朝. Angular Displacement Measurement Based on Lateral Shearing Interferometer Using Plane-Parallel Plate[J]. Chinese Journal of Lasers, 2007, 34(8): 1125.

一种基于平板横向剪切干涉的角位移测量方法

关于本站 Cookie 的使用提示

全站搜索

一种基于平板横向剪切干涉的角位移测量方法

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索