中国激光, 2020, 47 (12): 1201005, 网络出版: 2020-11-17
基于全介质共振域光栅的偏振器件设计与制备 
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Design and Fabrication of Polarizer Based on All-Dielectric Resonance-Domain Grating
图 & 表
图 1. 基于绝缘硅片的共振域光栅结构示意图
Fig. 1. Schematic diagram of resonance-domain grating structure based on SOI
图 2. 不同光栅周期的全介质共振域光栅透过率和消光比变化曲线。(a)透过率曲线;(b)消光比曲线
Fig. 2. Transmission and extinction ratio variation curves of all-dielectric resonance-domain grating with different grating periods. (a) Transmission curves; (b) extinction ratio curves
图 3. 不同光栅宽度的全介质共振域光栅透过率和消光比变化曲线。(a)透过率曲线;(b)消光比曲线
Fig. 3. Transmission and extinction ratio variation curves of all-dielectric resonance-domain grating with different grating widths. (a) Transmission curves; (b) extinction ratio curves
图 4. 不同刻蚀深度的全介质共振域光栅透过率和消光比变化曲线。(a)透过率曲线;(b)消光比曲线
Fig. 4. Transmission and extinction ratio variation curves of all-dielectric resonance-domain grating with different etch depths. (a) Transmission curves; (b) extinction ratio curves
图 5. 全介质共振域光栅在不同偏振光正入射时透过率、反射率和吸收率随不同入射光波长的变化曲线及在1.53μm入射波长下,光栅内部的电场横截面分布。(a)(c) TM偏振光;(b)(d) TE偏振光
Fig. 5. Transmission, reflection, and absorption variation curves of all-dielectric resonance-domain grating with different incident light wavelengths and cross section distributions of electric field inside grating at wavelength of 1.53μm under the normal incidence of different polarized lights. (a) (c) TM polarized light; (b) (d) TE polarized light
图 6. 全介质共振域光栅偏振器件的扫描电镜图
Fig. 6. Scanning electron micrograph of all-dielectric resonance-domain grating polarizer
图 7. 全介质共振域光栅偏振器件的偏振性能测试原理图
Fig. 7. Schematic of polarization performance measurement for all-dielectric resonance-domain grating polarizer
魏张帆, 胡敬佩, 张冲, 董延更, 曾爱军, 黄惠杰. 基于全介质共振域光栅的偏振器件设计与制备[J]. 中国激光, 2020, 47(12): 1201005. Wei Zhangfan, Hu Jingpei, Zhang Chong, Dong Yangeng, Zeng Aijun, Huang Huijie. Design and Fabrication of Polarizer Based on All-Dielectric Resonance-Domain Grating[J]. Chinese Journal of Lasers, 2020, 47(12): 1201005.
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