对XeCl准分子激光蒸发YBa2Cu3O7-x陶瓷靶产生的等离子体进行了实验和理论研究.利用发射光谱,分辨出等离子体内的各种粒子.并对各种粒子进行了飞行时间谱测量.在实验的基础上,建立了一个等离子体的膨胀模型.计算结果与实验符合较好.

The experimental and theoretical investigations of the plasma produced by XeCl excimer laser evaporation of YBa2Cu3O7-aaaaaaaaaaaaaaaaa target are presented in this paper. The plasma emission spectrum was analysed with the Optical Spectrum Analyser (OSA) and a series of species in the plasma plume were resolved. Then the time-of-flight spectra of the species were measured using a monochromator with an optical fibre sampling system. An expansion model of the plasma plume was suggested on the basis of the experiment. By using the model, the time-of-flight spectra, the spatial characteristics of the plsma plume and the distribution of the superconducting thin film thickness deposited by the plasma were simulated. The calculaton results are in good agreement with the deposition experiments.