光学学报, 2019, 39 (5): 0522001, 网络出版: 2019-05-10
具有迟滞补偿的单压电变形镜的闭环校正性能 
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Performance of Closed-Loop Correction with Hysteresis Compensation for Unimorph Deformable Mirror
图 & 表
图 1. 典型的变形镜闭环控制系统。(a)自适应光学系统的原理;(b)变形镜闭环控制框图
Fig. 1. Typical closed-loop control system of deformable mirror. (a) Principle diagram of adaptive optics system; (b) block diagram of closed-loop control of deformable mirror
图 2. 基于PI模型的变形镜闭环控制框图
Fig. 2. Block diagram of closed-loop control of deformable mirror based on PI model
图 4. 典型致动器的迟滞特性与迟滞拟合。(a)致动器的变形响应;(b)迟滞拟合曲线
Fig. 4. Hysteresis characteristic and fitting of typical actuator. (a) Deformation response of actuators; (b) hysteresis fitting curves
图 5. 像散(Z3)闭环校正。(a)目标像散形貌;(b)像散系数;(c)波前误差的RMS
Fig. 5. Closed-loop correction of astigmatism Z3. (a) Target astigmatic profile; (b) astigmatism coefficient; (c) wavefront error RMS
图 7. 闭环校平前后的波前3D形貌。(a)初始波前;(b) 1次校正后的波前(未消除迟滞);(c) 1次校正后的波前(消除迟滞后);(d)闭环迭代10次后的波前
Fig. 7. 3D profiles of wavefronts before and after closed-loop correction. (a) Initial wavefront; (b) wavefront without hysteresis compensation after one correction; (c) wavefront with hysteresis compensation after one correction; (d) wavefront after 10 iterations in closed-loop
杨宗峰, 李文来, 彭泰然, 崔玉国, 马剑强. 具有迟滞补偿的单压电变形镜的闭环校正性能[J]. 光学学报, 2019, 39(5): 0522001. Zongfeng Yang, Wenlai Li, Tairan Peng, Yuguo Cui, Jianqiang Ma. Performance of Closed-Loop Correction with Hysteresis Compensation for Unimorph Deformable Mirror[J]. Acta Optica Sinica, 2019, 39(5): 0522001.
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