半导体光子学与技术, 2005, 11 (1): 61, 网络出版: 2011-08-18  

Piezoresistive Sensors Based on Carbon Nanotube Films

Piezoresistive Sensors Based on Carbon Nanotube Films
作者单位
1 Dept. of Appl. Phys., Chongqing University, Chongqing 400044, CHN
2 Chongqing Daily Group, Chongqing 400010, CHN
3 Chongqing Optoelectronics Research Institute, Chongqing 400060, CHN
摘要
Abstract
Piezoresistive effect of carbon nanotube films was investigated by a three-point bending test. Carbon nanotubes were synthesized by hot filament chemical vapor deposition. The experimental results showed that the carbon nanotubes have a striking piezoresistive effect. The relative resistance was changed from 0 to 10.5×10-2and 3.25×10-2for doped and undoped films respectively at room temperature when the microstrain under stress from 0 to 500. The gauge factors for doped and undoped carbon nanotube films under 500 microstrain were about 220 and 67 at room temperature, respectively, exceeding that of polycrystalline silicon (30) at 35℃. The origin of the resistance changes in the films may be attributed to a strain-induced change in the band gap for the doped tubes and the defects for the undoped tubes.
参考文献

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LV Jian-wei, WANG Wan-lu, LIAO Ke-jun, WANG Yong-tian, LIU CHang-lin, Zeng Qing-gao. Piezoresistive Sensors Based on Carbon Nanotube Films[J]. 半导体光子学与技术, 2005, 11(1): 61. LV Jian-wei, WANG Wan-lu, LIAO Ke-jun, WANG Yong-tian, LIU CHang-lin, Zeng Qing-gao. Piezoresistive Sensors Based on Carbon Nanotube Films[J]. Semiconductor Photonics and Technology, 2005, 11(1): 61.

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