猫眼回波探测1.06 μm激光引发硅的损伤演化

雷鹏; 孙可; 张玉发; 聂劲松; 孙晓泉

doi:doi:10.3788/irla201645.1206007

红外与激光工程, 2016, 45 (12): 1206007, 网络出版: 2017-01-12

猫眼回波探测1.06 μm激光引发硅的损伤演化

Cat’s eye echo detecting the damage evolution of silicon induced by 1.06 μm laser

论文大纲

雷鹏 ^*孙可张玉发聂劲松孙晓泉

作者单位

脉冲功率激光技术国家重点实验室(电子工程学院), 安徽合肥 230037

猫眼回波微观损伤形貌演化纹理特征 cat′s eye echo-wave micro damage morphology evolution texture feature

摘要

利用猫眼回波的变化研究焦平面上硅在激光辐照下的损伤演化。随着激光辐照时间的增加, 回波图像出现抖动, 产生新的纹理, 判定焦平面上硅受到损伤。损伤对应的回波图像面积不断扩大, 损伤区内光斑结构逐渐变得复杂, 且光斑面积不断减小, 最终形成动态稳定的损伤回波图像。依据回波图像的变化分析硅的损伤形貌, 依次出现表面氧化、小尺度形貌损伤、损伤面积扩大等现象。初步分析了回波图像纹理特征与焦平面上硅损伤形貌的对应关系, 认为回波图像损伤区光斑的自相关性与角二阶矩随着损伤形貌粗糙度的增大而减小。

Abstract

Detecting silicon damage evolution induced by laser irradiation on the focal plane was researched through the change of cat′s eye echo. With the time increase of laser irradiation, the echo images started to shake and new texture appeared, which indicate the silicon was damaged. The area of echo images corresponding to the silicon damage expanded unceasingly. The facular structure in the damaged echo image became complicated and the facular area became smaller. The damaged echo image was dynamic stability under the laser irradiation at last. According to the change of echo images, the silicon damage morphology were analyzed. The phenomena of surface oxidation, small scale damage and the expanding of damaged area were observed. The corresponding relationship between the echo image texture feature and the silicon damage morphology was analyzed preliminarly. The correlation and angular second moment would be decreased if the roughness of the damage morphology increased.

参考文献

[1] 刘红婕, 周信达, 黄进, 等. 355 nm 纳秒紫外激光辐照下熔石英前后表面损伤的对比研究[J]. 物理学报, 2011, 60(6): 065202.

Liu Hongjie, Zhou Xinda, Huang Jin, et al. Comparison of damage between front and rear surfaces under nanosecond 355 nm laser irradiation on fused silica[J]. Acta Physica Sinica, 2011, 60(6): 065202. (in Chinese)

[2] Chen C S, Liu A H, Sun G, et al. Analysis of laser damage threshold and morphological changes at the surface of a HgCdTe crystal[J]. Journal of Optics a: Pure and Applied Optics, 2006, 8(1): 88-92.

[3] 常利阳, 李晓红, 邱荣, 等. 532 nm纳秒激光辐照下的单晶硅表面微结构及荧光特性[J]. 强激光与粒子束, 2012, 24(11): 2599-2603.

Chang Liyang, Li Xiaohong, Qiu Rong, et al. Surface microstructures and photoluminescence characteristics of monocrystalline silicon irradiated by 532 nm nanosecond laser[J]. High Power Laser and Particle Beams, 2012, 24(11): 2599-2603. (in Chinese)

[4] 付博, 张翠娟, 罗飞, 等. 脉冲激光对绝缘体上硅材料的损伤机理研究[J]. 光学学报, 2010, 30(5): 1413-1417.

Fu Bo, Zhang Cuijuan, Luo Fei, et al. Studies on pulsed laser induced damage of silicon on insulator material[J]. Acta Optica Sinica, 2010, 30(5): 1413-1417. (in Chinese)

[5] 娄俊, 苏俊宏, 徐均琪, 等. He-Ne散射光检测光学薄膜激光损伤阈值[J]. 应用光学, 2008, 29(1): 131-135.

Lou Jun, Su Junhong, Xu Junqi, et al. Laser-induced damage threshold detection for optical thin films by scattered light of He-Ne laser[J]. Journal of Applied Optics, 2008, 29(1): 131-135. (in Chinese)

[6] Ni Xiaowu, Lu Jian, He Anzhi. New definition of laser damage threshold of thin film[J]. SPIE, 1991, 1519(pt1): 365-369. (in Chinese)

[7] 袁春华, 李晓红, 唐多昌, 等. Nd: YAG纳秒激光诱导硅表面微结构的演化[J]. 物理学报, 2010, 59(10): 7015-7019.

Yuan Chunhua, Li Xiaohong, Tang Duochang, et al. Evolution of silicon surface microstructure induced by Nd: YAG nanosecond laser[J]. Acta Physica Sinica, 2010, 59(10): 7015-7019. (in Chinese)

[8] 赵凯华, 钟锡华. 光学[M]. 北京: 北京大学出版社, 2008: 202-205.

Zhao Kaihua, Zhong Xihua. Optical[M]. Beijing: Peking University Press, 2008: 202-205. (in Chinese)

[9] 曹其智, 陈家璧. 光学中的散斑现象: 理论与应用[M]. 北京: 科学出版社, 2009: 1-5.

Cao Qizhi, Chen Jiabi. Speckle Phenomena in Optics: Theory and Applications[M]. Beijing: Science Press, 2009: 1-5. (in Chinese)

[10] 冯建. 基于激光散斑图像纹理分析的表面粗糙度研究[D]. 烟台: 烟台大学, 2007.

Feng Jian. Studies on the surface roughness with texture analysis of laser speckle images[D]. Yantai: Yantai Univercity, 2007. (in Chinese)

雷鹏, 孙可, 张玉发, 聂劲松, 孙晓泉. 猫眼回波探测1.06 μm激光引发硅的损伤演化[J]. 红外与激光工程, 2016, 45(12): 1206007. Lei Peng, Sun Ke, Zhang Yufa, Nie Jinsong, Sun Xiaoquan. Cat’s eye echo detecting the damage evolution of silicon induced by 1.06 μm laser[J]. Infrared and Laser Engineering, 2016, 45(12): 1206007.

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