光谱共焦显微技术结合了共焦显微镜的高空间分辨率和光谱分析的高波长分辨率，凭借精度高、适用性强、无损检测等特性，广泛应用于工业生产、生物医疗和半导体芯片等领域。首先介绍点光谱共焦系统的原理，指出点光谱共焦检测效率低的缺点。其次，针对光谱共焦显微技术的关键性能指标改善，阐述了在光源、色散物镜和光谱信号检测等方面所取得的主要成果，并对各类光源进行定性对比。随后展示光谱共焦显微技术的扫描方法，梳理了相关研究进展，并总结了相关方法的优点和缺点。最后，展望光谱共焦显微技术未来的发展趋势。

Chromatic confocal microscopy (CCM) combines the high spatial resolution of confocal microscope and the high wavelength resolution of spectral analysis. By virtue of the high precision, strong applicability, and nondestructive detection, it is widely used in the fields of industrial production, biomedicine, semiconductor chips, and other fields. This paper first introduces the principle of point chromatic confocal system and points out its drawback of low detection efficiency. Second, for improving the key performance indexes of chromatic confocal microscopy, the main achievements made in light source, dispersive objective lens, and spectral signal detection are described, and qualitative comparisons are made between various types of light sources. Subsequently, the scanning methods of chromatic confocal microscopy are demonstrated, the relevant research progress is sorted out, and the advantages and disadvantages of the relevant methods are summarized. Finally, the future developments of chromatic confocal microscopy are also prospected.