强激光与粒子束, 2008, 20 (4): 621, 网络出版: 2008-08-17  

Fe掺杂氢化非晶碳薄膜制备及其热稳定性能

Preparation and thermal stability of Fe-doped hydrogenated amorphous carbon films
作者单位
1 兰州大学,物理学院,兰州,730000
2 中国工程物理研究院,激光聚变研究中心,四川,绵阳,621900
3 南京大学,物理学院,南京,210093
摘要
以H2、反式-2-丁烯(T2B)和二茂铁混合气体为工作气体,用金属有机等离子体增强化学气相沉积法(PECVD)制备了Fe掺杂氢化非晶碳(a-C:H:Fe)薄膜.使用X射线光电子能谱(XPS)对a-C:H:Fe薄膜成分进行了分析.使用台阶仪、场发射扫描电镜(FESEM)、热重分析和紫外可见分光光度计(UV-VIS),对比分析了a-C:H薄膜和a-C:H:Fe薄膜的沉积速率、表面形貌、热稳定性和光学带隙变化.研究表明:相同制备条件下,相比a-C:H薄膜,a-C:H:Fe薄膜的沉积速率高,表面颗粒小,容易碳化,光学带隙变窄.
Abstract
作者简介:联系作者:吴卫东,男,研究员,主要从事薄膜物理研究;wuweidongdingliu@yahoo.cn.
参考文献

[1] Chen J Q,Freitas J A Jr,Meeker D L,et al.Optical characterization of amorphous hydrogenated carbon films[J].Diamond Relat Mater,2000,9:48-55.

[2] Vishwakarma P N,Subramanyam S V.Hopping conduction in boron doped amorphous carbon films[J].J Appl Phys,2006,100:113702.

[3] Theye M L,Paret V.Spatial organization of the sp2-hybridized carbon atoms and electronic density of states of hydrogenated amorphous carbon films[J].Carbon,2002,40:1153-1166.

[4] Han J C,Gao W,Zhu J Q,et al.Density-functional theory study of the microstructure,electronic structure,and optical properties of amorphous carbon[J].Phys Rev B,2007,75:155418.

[5] Konchits A A,Valakh Y M,Shanina B D,et al.Effects of ion implantation on electron centers in hydrogenated amorphous carbon films[J].J Appl Phys,2003,93:5905-5910.

[6] Podder J,Rusop M,Soga T,et al.Boron doped amorphous carbon thin films grown by r.f.PECVD under different partial pressure[J].Diamond Relat Mater,2005,14:1799-1804.

[7] Ray S C,Bao C W,Tsai H M,et al.Electronic structures and bonding properties of Si-doped hydrogenated amorphous[J].Appl Phys Lett,2004,85:4022-4024.

[8] Adamopoulos G,Robertson J,Morrison N A,et al.Hydrogen content estimation of hydrogenated amorphous carbon by visible Raman spectroscopy[J].J Appl Phys,2004,96:6348-6352.

[9] Toth S,Veres M,Fule M,et al.Influence of layer thickness on the photoluminescence and Raman scattering of a-C:H prepared from benzene[J].Diamond Relat Mater,2006,15:967-971.

[10] Wang A Y,Ahn H S,Lee K R,et al.Unusual stress behavior in W-incorporated hydrogenated amorphous carbon films[J].Appl Phys Lett,2005,86:111902.

[11] 吴卫东,罗江山,黄勇,等.H2及H+对CxH1-x薄膜表面状态的影响[J].强激光与粒子束,2000,12(5):593-596.(Wu W D,Luo J S,Huang Y,et al.The effect of H2 and H+ on CxH1-x film surface state.High Power Laser and Particle Beams,2000,12(5):593-596)

[12] 祁兰英,蒋小华,赵雪薇,等.短波长激光超热电子产生与抑制机理的研究[J].物理学报,2000,49:492-496.(Qi L Y,Jiang X H,Zhao X W,et al.Studies on the production and suppression mechanism of the hot electrons produced by short wavelength laser.Acta Physica Sinica,2000,49:492-496)

[13] Filik J,Lane I M,May P W,et al.Incorporation of sulfur into hydrogenated amorphous carbon films[J].Diamond Relat Mater,2004,13:1377-1384.

[14] Wu W D,Luo J S,Huang Y,et al.The production of CxH1-x film using low pressure plasma CVD[J].Nuclear Instruments and Methods in Physics Research A,2000,480:84-90.

[15] 张红瑞,郭新勇,丁佩,等.不同催化剂热解法制备硼碳氮纳米管过程中的影响[J].物理学报,2003,52:1808-1811.(Zhang H R,Guo X Y,Ding P,et al.The effect of different catalysts on the growth of boron carbonitride nanotubes by thermal decomposition.Acta Physica Sinica,2003,52:1808-1811)

[16] 程继鹏,张孝彬,孙沿林,等.垂直浮动催化CVD法合成毫米级定向纳米碳纤维束[J].无机化学学报,2004,20:1153-1157.(Cheng J P,Zhang X B,Sun Y L,et al.CVD synthesis of millimeter scale carbon nanofiber bundles using fluidized procedure.Chinese Journal of Inorganic Chemistry,2004,20:1153-1157)

[17] Smith F W.Optical constants of a hydrogenated amorphous carbon film[J].J Appl Phys,1984,55:764-771.

[18] Pascual E,Serra C,Bertran E.Optical absorption from graphitic clusters of hydrogenated amorphous carbon thin films[J].J Appl Phys,1991,70:5119-5121.

[19] Ye C,Ning Z Y,Cheng S H,et al.Optical properties of fluorinated carbon films prepared by electron cyclotron resonance trifluromethane and benzene plasmas[J].Diamond Relat Mater,2004,13:191-197.

张洪亮, 吴卫东, 何智兵, 刘兴华, 李俊, 曹林洪, 巨新, 唐永建, 谢二庆. Fe掺杂氢化非晶碳薄膜制备及其热稳定性能[J]. 强激光与粒子束, 2008, 20(4): 621. 张洪亮, 吴卫东, 何智兵, 刘兴华, 李俊, 曹林洪, 巨新, 唐永建, 谢二庆. Preparation and thermal stability of Fe-doped hydrogenated amorphous carbon films[J]. High Power Laser and Particle Beams, 2008, 20(4): 621.

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