反射式相位延迟器的性能研究

黄建兵; 张大伟; 张东平; 王英剑; 邵建达; 范正修

中国激光, 2005, 32 (6): 761, 网络出版: 2006-06-06

反射式相位延迟器的性能研究

Investigation on Properties of Reflection Phase Retarder

论文大纲

黄建兵 ^1,2,*张大伟 ^1,2张东平 ^1,2王英剑 ¹邵建达 ¹范正修 ¹

作者单位

¹ 中国科学院上海光学精密机械研究所光学薄膜技研发中心,上海 201800

² 中国科学院研究生院,北京 100039

薄膜相移反射式退火 thin films phase shift reflection-induced annealing

摘要

多层介质反射镜在非正入射的时候,两个不同的偏振态之间会产生不同的相移。通过优化设计,入射角为45°,在1285～1345 nm之间p,s波获得了270°±0.15°的相移和99.5％以上的反射率。对使用的膜系进行了每层光学厚度的误差分析。用离子束溅射技术制备相位延迟膜,在大气中对样品进行不同温度的退火,用分光光度计测试了光谱特性和用椭偏仪测试了相位特性。结果表明,未退火的样品在相应波段获得了267.5°±0.5°的相移和99.6％以上的反射率;根据拟合分析,最外层的误差和折射率与设计值的偏差是发生相移偏小的主要因素;随着退火温度的升高、折射率变小和物理厚度变大,相移将变小。

Abstract

When incoming light beams enter dielectric reflective mirror with certain incident angle, there is phase shift between the p-polarization and s-polarization. Based on optimizing design, when light is incident at 45 degree, the phase shift of 270°±0.15° is got in the range of 1285～1345nm, at the same time, the reflectivity of dielectric mirror maintains over 99.5%. The phase retarder was prepared with dual ion beam sputter system and then annealed at different temperatures in atmosphere, the spectrum and the phase of the sample were gained by spectrometer and the Fourier transform infrared spectroscopic ellipsomter, respectively. The results revealed that the as-deposited samples gained phase shift of 267.5°±0.5° and the reflectivity reached over 99.6%. It was found from the fitting analysis that the error of the outermost layer and deviation between refractive index and designed values play principal roles in decrease of phase shift, in addition, with the annealing temperature increasing, the refractive index of film decreases and physical thickness increases so that phase shift drops off.

参考文献

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黄建兵, 张大伟, 张东平, 王英剑, 邵建达, 范正修. 反射式相位延迟器的性能研究[J]. 中国激光, 2005, 32(6): 761. 黄建兵, 张大伟, 张东平, 王英剑, 邵建达, 范正修. Investigation on Properties of Reflection Phase Retarder[J]. Chinese Journal of Lasers, 2005, 32(6): 761.

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