中国激光, 1993, 20 (7): 544, 网络出版: 2007-12-07
双束沉积ZrOx薄膜时O+束流密度对其折射率的影响
Optical zirconia films produced by using dual ion beam technology
摘要
Abstract
Optical ZrO2 films produced with dual ion beam technology are reported for the first time. The dependence of deposition process on oxygen-to-zirconium composition ratio and the corresponding refractive index of the film are given in this paper, and the optimum conditions for the depositon process are suggested on the basis of the analyses of RBS, XPS, XRD and TEM.
参考文献
黄宁康. 双束沉积ZrOx薄膜时O+束流密度对其折射率的影响[J]. 中国激光, 1993, 20(7): 544. 黄宁康. Optical zirconia films produced by using dual ion beam technology[J]. Chinese Journal of Lasers, 1993, 20(7): 544.
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