用于形貌测量的光纤传感系统研究

杨瑞峰; 吴耀; 郭晨霞; 葛双超; 杨睿

doi:doi:10.14128/j.cnki.al.20193901.124

应用激光, 2019, 39 (1): 124, 网络出版: 2019-04-16

用于形貌测量的光纤传感系统研究

Optical Fiber Sensing System for Morphology Measurement

论文大纲

杨瑞峰 ^1,2,*吴耀 ^1,2郭晨霞 ^1,2葛双超 ^1,2杨睿 ^1,2

作者单位

¹ 中北大学仪器与电子学院, 山西太原 030051

² 山西省自动化检测装备与系统工程技术研究中心, 山西太原 030051

摘要

为了实现对工件表面形貌的非接触精密测量, 提出了一种基于光纤传感的表面形貌测量系统, 并对系统的测量原理和关键技术进行了研究。通过对光纤传感器发射光纤的出射光强进行建模分析, 找到光强调制函数与被测距离的对应关系。针对测量系统中光源的稳定性和工件表面反射率变化对形貌测量的影响, 提出了增加参考光路的补偿技术。实验结果表明, 标定的位移调制特性曲线具有较好的重复性, 重复性误差为3.82%, 且曲线前坡的线性区间为0.2～0.6 mm, 灵敏度为1.11 mW/mm, 在线性区间内进行微位移测量, 测量的平均绝对误差为2.8 μm, 对工件表面台阶高度标定值为100.0 μm 的台阶进行10次测量, 台阶高度的平均绝对误差为6.2 μm , 说明本测量系统能较好实现工件表面形貌的测量。

Abstract

optical fiber sensing was proposed, and the measurement principle and key technologies of the system were studied. Through modeling and analyzing the intensity of the emitted light of the fiber-optic sensor emitting fiber, the corresponding relationship between the intensity-enhanced function and the measured distance was found. Aiming at the influence of the stability of the light source in the measurement system and the change of the surface reflectivity of the workpiece on the topography measurement, proposed a compensation technique to increase the reference light path. The experimental results show that the calibrated displacement modulation characteristic curve has good repeatability, the repeatability error is 3.82%, and the linear range of the curve slope is 0.2～0.6 mm, and the sensitivity is 1.11 mW/mm, the micro-displacement measurement is performed in the linear interval, and the average absolute error of the measurement is 2.8 μm. The step of the workpiece with a height calibration of 100.0 μm is measured 10 times, and the average absolute error of the step height is 6.2 μm, which indicates that the measurement system can better measure the surface topography of the work piece.

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杨瑞峰, 吴耀, 郭晨霞, 葛双超, 杨睿. 用于形貌测量的光纤传感系统研究[J]. 应用激光, 2019, 39(1): 124. Yang Ruifeng, Wu Yao, Guo Chenxia, Ge Shuangchao, Yang Rui. Optical Fiber Sensing System for Morphology Measurement[J]. APPLIED LASER, 2019, 39(1): 124.

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