基于空间光调制器的波面重建优化方法研究

韩军; 郑婷; 聂亮; 安毓英

doi:doi:10.3788/gzxb20114009.1413

光子学报, 2011, 40 (9): 1413, 网络出版: 2011-10-11

基于空间光调制器的波面重建优化方法研究

Optimization Method of Reconstruct Wavefront Based on Spatial Light Modulator

论文大纲

韩军 ^1,*郑婷 ¹聂亮 ¹安毓英 ²

作者单位

¹ 西安工业大学光电工程学院，西安 710032

² 西安电子科技大学技术物理学院，西安 710071

摘要

针对不同非球面面形的实时检测需求，研究了基于空间光调制器的标准波面重建技术.基于空间光调制器波面重建的原理设计了干涉测量系统，依据空间光调制器的自身特点选取修正离轴计算全息编码方式实现对标准球波面的编码.针对实验中空间光调制器作为全息再现介质引起重建波面质量下降问题，提出了错位叠加优化方案，并将这一过程进行了模拟实验.结果表明,基于错位叠加方法的重建波面均方差值提高了近4.45倍.研究成果为非球面检测过程中标准波面的获取提供了可靠的理论基础.

Abstract

A wavefront reconstruction method was proposed based on spatial light modulator (SLM) to achieve the requirement of real-time testing of different aspheric surfaces. An interference measurement system based on SLM wavefront reconstruction was designed, in which the computer-generated hologram (CGH) encoding method was chosen according to the intrinsic properties of SLM. To resolve the quality degradation problem of the reconstructed wavefront, a dislocation optimization method was proposed. The process is verified through simulation, and the results showed that the RMS of the reconstructed wavefront was improved by 4.45 times.

参考文献

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韩军, 郑婷, 聂亮, 安毓英. 基于空间光调制器的波面重建优化方法研究[J]. 光子学报, 2011, 40(9): 1413. HAN Jun, ZHENG Ting, NIE Liang, AN Yu-ying. Optimization Method of Reconstruct Wavefront Based on Spatial Light Modulator[J]. ACTA PHOTONICA SINICA, 2011, 40(9): 1413.

基于空间光调制器的波面重建优化方法研究

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