光学学报, 2010, 30 (10): 2978, 网络出版: 2012-10-24   

Si衬底GaN基蓝光LED钝化增透膜研究

Research of Passivation and Anti Reflecting Layer on GaN Based Blue LED on Silicon Substrate
刘军林 1,2,*邱冲 2江风益 1,2
作者单位
1 南昌大学教育部发光材料与器件工程研究中心, 江西 南昌 330047
2 晶能光电(江西)有限公司, 江西 南昌 330029
摘要
在Si衬底GaN基蓝光LED芯片上生长了一层SiON钝化膜,使器件的光输出功率提高12%且有效降低了器件在老化过程中的光衰。对有、无钝化膜的样品进行性能比较,结果表明SiON钝化膜能有效隔离环氧树脂与高温芯片,缓解环氧树脂的老化变黄;又能部分弛豫环氧树脂对芯片的张应力,降低非辐射复合中心产生的几率;有效减小器件的侧壁漏电通道,降低器件的光衰和漏电流,提高器件的可靠性。
Abstract
SiON passivation layer is deposited on GaN blue LED based on Si substrate. It improves the light output power of LED by 12% and reduces the luminous decay of LED during aging efficiently. The analysis results of the samples with and without SiON passivation layer demonstrate that SiON layer can separate the epoxy from hot surface of LED during aging, which prevents epoxy resin from carbonization. In addition, the SiON layer can partly relax tensile stress of device from epoxy resin, and reduce the generation probability of non-radiation centers. Furthermore, SiON layer can reduce sidewall leakage current of LED. In a word, SiON layer can improve the stability of LED.
参考文献

[1] 邝海, 刘军林, 程海英 等. 转移基板材质对Si衬底GaN基LED芯片性能的影响[J]. 光学学报, 2008, 28(1): 143~145

    Kuang Hai, Liu Junlin, Cheng Haiying et al.. Effect of transferred submount materials on properties of GaN-based LED chips grown on Si substrate[J]. Acta Optica Sinica, 2008, 28(1): 143~145

[2] 史玲娜, 黄尚廉, 孙吉勇 等. LED照明的光栅光调制器光学特性分析与实验[J]. 光学学报, 2008, 28(11): 2225~2231

    Shi Lingna, Huang Shanglian, Sun Jiyong et al.. Optical performance analysis and experiment of grating light modulator with LED light source[J]. Acta Optica Sinica, 2008, 28(11): 2225~2231

[3] Zongyou Yin, Densen Cao, Jingzhi Yin et al.. Fabrication of blue LEDs on big chips[J]. Chin. Opt. Lett., 2003, 1(4): 220~221

[4] 吴海彬, 王昌铃, 何素梅. 涂敷红、绿荧光粉的白光LED显色性研究[J]. 光学学报, 2008, 28(9): 1777~1782

    Wu Haibin, Wang Changling, He Sumei. Research of color rendering of white LED based on red and green phosphors[J]. Acta Optica Sinica, 2008, 28(9): 1777~1782

[5] Soonjin So, Choonbae Park. Improvement of brightness with Al2O3 passivation layers on the surface of InGaN/GaN-based light-emitting diode chips[J]. Thin Solid Films, 2008, 516(8): 2031~2034

[6] Guangdi Shen, Xiaoli Da, Xia Guo et al.. Effects of the passivation layer deposition temperature on the electrical and optical properties of GaN-based light-emitting diodes[J]. J. Luminesce., 2007, 127(2): 441~445

[7] Xiaoli Da, Xia Guo, Limin Dong et al.. The silicon oxynitride layer deposited at low temperature for high-brightness GaN-based light-emitting diodes[J]. Solid-State Electronics, 2006, 50(3): 508~510

[8] Yanxu Zhu, Chen Xu, Xiaoli Da et al.. GaN-based light-emitting diodes with SiONx on sidewalls[J]. Semiconductor Science and Technology, 2007, 22(6): 659~662

[9] 达小丽, 沈光地, 徐晨 等. 钝化膜提高GaN基LED光提取效率研究[J]. 固体电子学研究与进展, 2007, 27(4): 558~561

    Da Xiaoli, Shen Guangdi, Xu Chen et al.. Study on enhancement of light output power for GaN based LED by coating passivation layers[J]. Research & Progress of SSE, 2007, 27(4): 558~561

[10] Mo Chunlan, Fang Wenqing, Liu Hechu et al.. Growth and characterization of InGaN blue LED structure on Si (111) by MOCVD[J]. Crystal Growth, 2005, 28(5): 312~316

[11] G. Meneghesso, S. Levada, E. Zanoni et al.. Reliability of visible GaN LEDs in plastic package[J]. Microelectronics Reliability, 2003, 43(9~11): 1737~1742

[12] 周利寅, 贺英, 张文飞 等. LED封装用环氧树脂/环氧倍半硅氧烷杂化材料的研制理[J]. 工程塑料应用, 2009, 37(3): 5~8

    Zhou Liyin, He Ying, Zhang Wenfei et al.. Development of epoxy/epoxy-silsesquioxane hybrid material for LED packaging[J]. Engineering Plastics Application, 2009, 37(3): 5~8

[13] M. Meneghini, L. Trevisanello, C. Sanna et al.. High temperature electro-optical degradation of InGaN/GaN HBLEDs[J]. Microelectronics Reliability, 2007, 47(9~11): 1625~1629

[14] 林亮, 陈志忠, 陈挺 等. 白光LED的加速老化特性[J]. 发光学报, 2005, 26(5): 617~621

    Lin Liang, Chen Zhizhong, Chen Ting et al.. Characteristics of the accelerated aging white LEDs[J]. Chin. J. Luminesc, 2005, 26(5): 617~621

[15] Z. Q. Fang, D. C. Reynolds, D. C. Look. Changes in electrical characteristics associated with degradation of InGaN blue light-emitting diodes[J]. J. Electron. Mater., 2000, 29(4): 448~450

[16] X. A. Cao, P. M. Sandvik, S. F. LeBoeuf et al.. Defect generation in InGaN/GaN light-emitting diodes under forward and reverse electrical stresses[J]. Microelectronics Reliability, 2003, 43(12): 1987~1991

刘军林, 邱冲, 江风益. Si衬底GaN基蓝光LED钝化增透膜研究[J]. 光学学报, 2010, 30(10): 2978. Liu Junlin, Qiu Chong, Jiang Fengyi. Research of Passivation and Anti Reflecting Layer on GaN Based Blue LED on Silicon Substrate[J]. Acta Optica Sinica, 2010, 30(10): 2978.

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