红外与激光工程, 2016, 45 (12): 1206009, 网络出版: 2017-01-12  

KrF激光和脉冲CO2激光损伤K9玻璃的实验对比与分析

Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO2 laser
王玺 1,2,3,*方晓东 1
作者单位
1 中国科学院安徽光学精密机械研究所, 安徽 合肥 230031
2 中国科学技术大学, 安徽 合肥 230029
3 解放军电子工程学院 脉冲功率激光技术国家重点实验室, 安徽 合肥 230037
摘要
对KrF准分子激光辐照K9玻璃进行了损伤实验, 并与脉冲CO2激光损伤K9玻璃进行了对比分析, 研究了紫外和远红外两种激光系统对同种光学材料的损伤特性。实验结果结果表明, KrF准分子激光和脉冲CO2激光对K9玻璃的损伤形貌基本相同, 损伤主要是热力耦合损伤机制, 但是两者在损伤阈值和损伤时间等方面仍有很大差别。与脉冲CO2激光相比, K9玻璃的KrF准分子激光损伤阈值更低, 并且损伤持续时间更短。通过两类激光在波长和光子能量上的巨大差异可以很好地解释这一现象。该研究结果对准分子激光在空间工程应用上有着非常重要的参考价值。
Abstract
It has very important application value to investigate the damage performance of K9 glass irradiated by ultraviolet excimer laser. In this paper, the experiment research on damage in K9 glass irradiated by 248 nm KrF excimer laser was carried out, the sample damage threshold and damage morphology were analyzed by means of metallurgical microscope and scanning electron microscope. The comparison of laser induced damage performance between KrF excimer laser and pulse CO2 laser were investigated. The experimental results indicate that the damage mechanism of K9 glass irradiated by KrF excimer laser and pulse CO2 laser mainly follow the thermal-mechanical coupling mechanism. However, there is apparent difference in damage threshold and damage time. For example, the damage threshold is lower and the damage time is shorter for KrF excimer laser. This can be explained by the difference in wavelength and photon energy between the KrF excimer laser and pulse CO2 laser. The research presented in this paper is helpful for further exploring the ultraviolet excimer laser damage mechanism of optical materials.
参考文献

[1] Carr C W, Bude J D, De M P. Laser-supported solid-state absorption fronts in silica[J]. Physical Review B, 2010, 82(18): 184304.

[2] Pan Y X. Effect of inclusion matrix model on temperature and thermal stress fields of K9-glass damaged by long-pulse laser[J]. Opt Eng, 2013, 53(4): 044302.

[3] Jones S C. Recent progress on laser-induced modifications and intrinsic bulk damage of wide-gap optical materials[J]. Opt Eng, 1989, 28(10): 1039-1068.

[4] Gallais L, Natoli J Y, Amra C. Statistical study of single and multiple pulse laser-induced damage in glasses[J]. Opt Express, 2002, 10(25): 1465-1474.

[5] Miller P E, Suratwala T I, Wong L L. The distribution of subsurface damage in fused silica[C]//SPIE, 2005, 5991: 599101.

[6] Pan Yunxiang, Shen Zhonghua, Lu Jian, et al. Analysis of temperature and thermal stress fields of K9 glass damaged by 1064nm nanosecond pulse laser[C]//SPIE, 2013, 8603: 860308.

[7] Zhang H B, Yuan Z J, Zhou J, et al. Effects of prism beam expander and slits on excimer laser linewidth narrowing modules[J]. Chin Opt Lett, 2013, 11(04): 041405.

[8] Joly P, Petrarca M, Vogel A, et al. Laser-induced condensation by ultrashort laser pulses at 248 nm[J]. Appl Phys Lett, 2013, 102(9): 091112.

[9] Schutz-Kuchly T, Slaoui A, Zelgowski J, et al. UV and IR laser induced ablation of Al2O3/SiN: H and a-Si: H/SiN: H[J]. EPJ Photovoltaics, 2013, 5: 55201.

[10] Ihlemann J, Weichenhain-Schriever R. Pulsed laser-induced formation of silica nanogrids[J]. Nanoscale Research Letters, 2014, 9(1): 102.

[11] Rosen D I. Coupling of pulsed 0. 35 μm laser radiation to aluminum alloys[J]. Appl Phys, 1982, 53(10): 3190.

[12] Brusasco R M, Penetrante B M, Peterson J E. UV-laser conditioning for reduction of 351nm damage initiation in fused silica[C]//SPIE, 2002, 4679: 48-55.

[13] 刘红婕, 王风蕊, 罗青, 等. K9玻璃和熔石英玻璃纳秒基频激光损伤特性的实验对比研究[J]. 物理学报, 2012, 61(7): 076103.

    Liu Hongjie, Wang Fengrui, Luo Qing, et al. Experimental comparison of damage performance induced by nanosecond 1ωlaser between K9 glass and fused silica optics[J]. Acta Phys Sin, 2012, 61(7): 076103. (in Chinese)

[14] 王玺, 李化, 聂劲松. 脉冲CO2激光损伤K9玻璃的实验研究与仿真[J]. 中国激光, 2008, 35(11): 1760-1765.

    Wang Xi, Li Hua, Nie Jinsong. Simulation and experimental research on damage in K9 glass due to pulsed CO2 laser radiation[J]. Chinese J Lasers, 2008, 35(11): 1760-1765. (in Chinese)

[15] 王玺, 卞进田, 李化, 等. 重频脉冲CO2激光损伤K9玻璃的实验[J]. 红外与激光工程, 2013, 42(5): 1204-1207.

    Wang Xi, Bian Jintian, Li Hua, et al. Experiment on damage in K9 glass due to repetition rate pulsed CO2 laser radiation[J]. Infrared and Laser Engineering, 2013, 42(5): 1204-1207. (in Chinese)

王玺, 方晓东. KrF激光和脉冲CO2激光损伤K9玻璃的实验对比与分析[J]. 红外与激光工程, 2016, 45(12): 1206009. Wang Xi, Fang Xiaodong. Experimental comparison and analysis on damage performance of K9 glass irradiated by KrF excimer laser and pulse CO2 laser[J]. Infrared and Laser Engineering, 2016, 45(12): 1206009.

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