利用磁控溅射制备了各种工艺参数不同的微球表面金属Mo涂层样品,并通过白光干涉仪和扫描电子显微镜对样品的表面及剖面进行了系统的测试分析。分别探究了溅射工作气压和沉积制备时间对微球表面Mo涂层表面形貌以及结晶质量的影响规律。结果表明通过优化工艺参数可制备微球直径约为800 μm、涂层厚度为3.5 μm到14.1 μm、厚度均匀性良好的微球表面Mo涂层。Mo涂层中的晶粒呈现出柱状结构致密堆积在一起,且随涂层的厚度增加晶粒间空隙增大。

Mo coatings on microspheres surface were fabricated by magnetron sputtering with different conditions. Using white light interference instrument and scanning electron microscope, the cross section and surface morphology of the samples were studied. The effects of working pressure and sputtering time on the morphology of Mo coatings were investigated. The result shows that Mo coatings with a thickness from 3.5 μm to 14.1 μm can be fabricated on microspheres surface, all of the coating thicknesses are uniform. The coatings show highly packed microstructures, with coating thickness increased, the interspaces between different grains increase.