三维成像激光雷达系统中的微电子机械系统扫描：扫描视场角与扩束

李小宝; 王春晖; 曲扬; 任逍遥

doi:doi:10.3788/lop52.111501

激光与光电子学进展, 2015, 52 (11): 111501, 网络出版: 2015-11-09

三维成像激光雷达系统中的微电子机械系统扫描：扫描视场角与扩束下载： 1200次

Micro-Electromechanical Systems Scan in Three-Dimensional Imaging Lidar System: Scanning Field Angle and Beam Expender

论文大纲

李小宝 ^1,2,*王春晖 ^1,2曲扬 ^1,2任逍遥 ^1,2

作者单位

¹ 哈尔滨工业大学可调谐激光技术国家重点实验室, 黑龙江哈尔滨 150080

² 哈尔滨工业大学光电子技术研究所, 黑龙江哈尔滨 150080

机器视觉三维遥感成像激光雷达系统设计望远镜 machine vision three-dimensional sensing lidar system design telescopes

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摘要

基于微电子机械系统(MEMS)微镜的二维光学扫描系统是趋于低成本、小型化和高清晰的新一代三维成像激光雷达的核心部件之一。由于现有可实现二维高帧频扫描的MEMS 其口径和扫描角度有限，因而需要对经MEMS微镜扫描后的激光束进行相应扩角和扩束。讨论了开普勒式扩束望远镜系统对扫描光束扩束之后光斑大小与扫描视场角之间的制约关系；推演得到了扫描角与扩束倍率之间的关系式；提出了一种三维成像激光雷达系统中的基于MEMS 和开普勒式望远镜的扫描与变焦扩束系统结构，并在此基础上利用Zemax 软件设计出了11 片式的扫描变倍扩束光学系统，其模拟的结果与理论计算值完全相吻合。

Abstract

Micro-electromechanical systems (MEMS) based on two-dimensional optical scan system is one of the core parts in the new generation three-dimensional imaging lidar system, which is developing towards to direction of low-cost, miniaturization and high-definition. Because of the limited aperture and maximum scan angle of the MEMS off- the- shelf, which can scan along two axes in bi- direction with high frame frequency, the laser beam reflected off the MEMS needs scanning angle expender and beam expender. We discuss the restrictive relationship between the spot size of the scan beam which is expended by Keplerian telescope system and the scan angle, derives the relationship between scan angle and the beam expender ratio, proposes the structure of a scan and zoom beam expender system which is based on MEMS and Keplerian telescope for three-dimensional imaging lidar system, and then on this basis gives an eleven piece type scan and zoom beam expender optical system designed by the optical design software Zemax, the result of the Zemax simulation has been shown perfectly conformed to the theoretical calculation.

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李小宝, 王春晖, 曲扬, 任逍遥. 三维成像激光雷达系统中的微电子机械系统扫描：扫描视场角与扩束[J]. 激光与光电子学进展, 2015, 52(11): 111501. Li Xiaobao, Wang Chunhui, Qu Yang, Ren Xiaoyao. Micro-Electromechanical Systems Scan in Three-Dimensional Imaging Lidar System: Scanning Field Angle and Beam Expender[J]. Laser & Optoelectronics Progress, 2015, 52(11): 111501.

三维成像激光雷达系统中的微电子机械系统扫描：扫描视场角与扩束下载： 1200次

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