激光与光电子学进展, 2017, 54 (11): 112205, 网络出版: 2017-11-17   

大倍率干涉显微物镜的光学系统设计 下载: 1357次

Design of Optical System for Large Magnification Interference Microscope Objective
作者单位
上海理工大学光电信息与计算机工程学院, 上海 200093
摘要
干涉显微物镜是干涉测量显微镜的关键部件,在微纳表面三维形貌测量中应用广泛。设计了一款无限远共轭大倍率Mirau干涉显微物镜,其放大倍率为50×,数值孔径为0.5。基于系统长工作距的特性,干涉物镜采用反远距物镜结构。根据二级光谱理论,分析了干涉物镜的二级色差校正,合理选择了玻璃材料和初始结构。利用光学设计软件Code-V进行系统优化设计,设计结果表明,光学系统全视场范围内在800 lp/mm处的调制传递函数大于0.3,其他各项指标满足设计要求。通过非序列模式建模对所设计的干涉物镜进行光线追迹,仿真分析得到清晰的牛顿环干涉图,结果验证了设计的合理性。
Abstract
Interference microscope objective is a key component of interferometric microscopy, which is widely used in the measurement of three-dimensional topography of micro-nano-surface. In this paper, an infinite conjugate large magnification Mirau interference microscope objective is designed, with the magnification ratio of up to 50× and the numerical aperture of 0.5. Based on the characteristics of the long working distance of the system, the interference objective lens adopts the retrofocus objective structure. According to the second-order spectral theory, the secondary spectral aberration correction of the interference objective is analyzed, and the glass materials and lens initial structure are selected rationally. The optical system is optimized by utilizing the optical design software Code-V. The design results show that the modulation transfer function at 800 lp/mm is more than 0.3 in the whole field of view of the optical system, and other indexes all meet the design requirements. By non-sequential modeling, optical tracing of the designed interference objective is carried out, the clear Newton ring interferogram is obtained by simulation and analysis. Which proves the rationality of the design.
参考文献

[1] 翟传蒙. 基于Mirau干涉显微镜的微光学表面参数测量研究[D]. 南京: 南京理工大学, 2013.

    Zhai Chuanmeng. Measurement of Mirau interference microscope on micro-optical surface parameters[D]. Nanjing: Nanjing University of Science and Technology, 2013.

[2] Shi D, Qin J, Hung Y Y. Automated measurement of 3-D shapes by a dual-beam digital speckle interferometric technique[C]. SPIE, 1991, 1554A: 680-689.

[3] 郭媛, 毛琦, 陈小天, 等. 干涉条纹快速加窗傅里叶滤波方法的研究[J]. 光学学报, 2014, 34(6): 0612008.

    Guo Yuan, Mao Qi, Chen Xiaotian, et al. Study of a fast windowed Fourier filtering method for interference fringes[J]. Acta Optica Sinica, 2014, 34(6): 0612008.

[4] 张志会, 王华英, 刘佐强, 等. 基于快速傅里叶变换的相位解包裹算法[J]. 激光与光电子学进展, 2012, 49(12): 120902.

    Zhang Zhihui, Wang Huaying, Liu Zuoqiang, et al. Phase unwrapping algorithms based on fast Fourier transform[J]. Laser & Optoelectronics Progress, 2012, 49(12): 120902.

[5] 李闽珏. 部分相干干涉显微镜的设计与实验研究[D]. 南京: 南京理工大学, 2015.

    Li Minjue. Design and experimental study of partial coherent interference microscopic[D]. Nanjing: Nanjing University of Science and Technology, 2015.

[6] 江毅. 光纤白光干涉测量术新进展[J]. 中国激光, 2010, 37(6): 1413-1420.

    Jiang Yi. Progress in fiber optic white-light interferometry[J]. Chinese J Lasers, 2010, 37(6): 1413-1420.

[7] 张红霞. 用于微表面形貌检测的纳米级白光相移干涉研究及仪器化[D]. 天津: 天津大学, 2004.

    Zhang Hongxia. Research of nanometer white-light phase-shifting interferometry and instrumentation used of micro-surface topography measurement[D]. Tianjin: Tianjin University, 2004.

[8] 王美钦, 王忠厚, 白加光. 宽谱段光学系统消二级光谱的设计[J]. 应用光学, 2010, 31(3): 360-364.

    Wang Meiqin, Wang Zhonghou, Bai Jiaguang. Removing secondary spectrum in wide spectrum optical system[J]. Journal of Applied Optics, 2010, 31(3): 360-364.

[9] 刘莹奇. 宽光谱光学系统复消色差研究[D]. 哈尔滨: 哈尔滨工业大学, 2009.

    Liu Yingqi. Study on apochromatism of wide spectral optical system[D]. Harbin: Harbin Institute of Technology, 2009.

[10] 赫玉琢, 张屹. 潜望镜照相窗口光学系统二级光谱校正分析[J]. 三峡大学学报(自然科学版), 2015, 37(1): 97-100.

    He Yuzhuo, Zhang Yi. Correction analysis of secondary spectrum optical system in periscope photographic window[J]. Journal of China Three Gorges University (Natural Sciences), 2015, 37(1): 97-100

[11] Mercado R I. Correction of secondary and higher-order spectrum using special materials[C]. SPIE, 1991,1535: 184-197.

[12] 郭彤, 胡春光, 胡晓东, 等. 利用Mirau显微干涉仪测量微器件的纳米级运动[J]. 光子学报, 2005, 34(10): 1542-1545.

    Guo Tong, Hu Chunguang, Hu Xiaodong, et al. Measuring nanoscale motions of microdevices using a Mirau interferometer[J]. Acta Photonica Sinica, 2005, 34(10): 1542-1545.

[13] 张红霞, 张以谟, 井文才, 等. Mirau相移干涉术中的中心遮拦研究[J]. 光电子·激光, 2004, 15(10): 1218-1221.

    Zhang Hongxia, Zang Yimo, Jing Wencai, et al. Research on central obscuration in Mirau phase-shifting interferometry[J]. Journal of Optoelectronics·Laser, 2004, 15(10): 1218-1221.

[14] 金斯莱克. 透镜设计基础[M]. 北京: 机械工业出版社, 1985: 109-121.

    Kingslake R. Lens design fundamentals[M]. Beijing: China Machine Press, 1985: 109-121.

[15] 郁道银, 谈恒英. 工程光学[M]. 北京: 机械工业出版社, 2011: 123-125.

    Yu Daoyin, Tan Hengying. Engineering optics[M]. Beijing: China Machine Press, 2011: 123-125.

[16] 张以谟. 应用光学[M]. 天津: 天津大学出版社, 1988: 315-327.

    Zhang Yimo. Applied optics[M]. Tianjin: Tianjin University Press, 1988: 315-327.

孟涵, 万新军, 董一帆, 解树平, 宾博逸. 大倍率干涉显微物镜的光学系统设计[J]. 激光与光电子学进展, 2017, 54(11): 112205. Meng Han, Wan Xinjun, Dong Yifan, Xie Shuping, Bin Boyi. Design of Optical System for Large Magnification Interference Microscope Objective[J]. Laser & Optoelectronics Progress, 2017, 54(11): 112205.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!