在普通850 nm 垂直腔面发射激光器基础上制备出带有金属纳米颗粒结构的微小孔径垂直腔面发射激光器。当小孔和金属颗粒的直径分别为400 nm 和100 nm 时,其最大输出光功率达到0.5 mW。介绍了该器件的制备工艺,从实验和理论两方面验证了金属纳米颗粒结构激发局域表面等离子体,从而使输出光功率得到提高。

Nano-aperture vertical-cavity surface-emitting lasers (VCSELs) with metal nano-particle are fabricated based on common 850 nm VCSELs. When the diameters of the aperture and the metal nano-particle are 400 nm and 100 nm respectively,the maximum far-field output power reaches 0.5 mW. The fabrication process is introduced and the output power enhancement due to localized surface plasmon is also analyzed by experiment and theory.