Effects of fabrication errors on diffraction efficiency for a diffractive membrane

Ruoqiu Wang; Zhiyu Zhang; Chengli Guo; Donglin Xue; Xuejun Zhang

doi:doi:10.3788/COL201614.120501

Chinese Optics Letters, 2016, 14 (12): 120501, Published Online: Aug. 2, 2018

Effects of fabrication errors on diffraction efficiency for a diffractive membrane Download： 971次

Ruoqiu Wang ^1,2Zhiyu Zhang ^1,*Chengli Guo ^1,2Donglin Xue ¹Xuejun Zhang ¹

Author Affiliations

¹ Key Laboratory of Optical System Advanced Manufacturing Technology of the Chinese Academy of Sciences, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

² University of Chinese Academy of Sciences, Beijing 100049, China

Figures & Tables

Fig. 5. (a) Phase distribution of a 4-level element with etching depth errors, and (b) relationship between etching depth errors and diffraction efficiency.

下载图片查看原文

Fig. 6. (a) Phase distribution of a 4-level element with overlay registration errors, and (b) relationship between overlay registration errors and diffraction efficiency.

下载图片查看原文

Fig. 7. (a) Phase distribution of a 4-level element with linewidth errors, and (b) relationship between linewidth errors and diffraction efficiency.

下载图片查看原文

Fig. 8. Phase distribution of a 4-level membrane FZL with width transfer errors.

下载图片查看原文

Fig. 9. Phase distribution of a 4-level membrane FZL with depth transfer errors.

下载图片查看原文

Fig. 10. Relationship between transfer errors and diffraction efficiency.

下载图片查看原文

Fig. 11. Photo of 4-step level membrane FZL.

下载图片查看原文

Fig. 12. (a)–(b) Micrographs of two observations in 200× magnification, (c) cross-section profile at the outermost period of diffractive membrane, and (d) 3D scanning result.

下载图片查看原文

Fig. 13. (a) Linewidths on membrane and (b) test result of each step depth on the membrane.

下载图片查看原文

Fig. 14. Distribution map of different diffractive orders.

下载图片查看原文

Table1. Experimental Data of Diffraction Efficiency

Times	1	2	3	4	5	6	7	8	9	10
$E_{1} / μm$	1.880	1.854	1.881	1.780	1.880	1.890	1.800	1.878	1.923	1.879
$E_{0} / μm$	2.598	2.670	2.599	2.489	2.60	2.670	2.532	2.60	2.743	2.596
$η / %$	72.4	69.4	72.4	71.5	72.3	70.8	71.1	72.2	70.1	72.4

查看原文

Ruoqiu Wang, Zhiyu Zhang, Chengli Guo, Donglin Xue, Xuejun Zhang. Effects of fabrication errors on diffraction efficiency for a diffractive membrane[J]. Chinese Optics Letters, 2016, 14(12): 120501.

Effects of fabrication errors on diffraction efficiency for a diffractive membrane Download： 971次

Fig. 1. Process flow for a 4-level master FZL fabrication.

Fig. 2. Process flow for a membrane FZL replication.

Fig. 3. Schematic of an on-substrate prefixing fixture.

Fig. 4. Phase distribution of a 4-level diffractive element.

Fig. 5. (a) Phase distribution of a 4-level element with etching depth errors, and (b) relationship between etching depth errors and diffraction efficiency.

Fig. 6. (a) Phase distribution of a 4-level element with overlay registration errors, and (b) relationship between overlay registration errors and diffraction efficiency.

Fig. 7. (a) Phase distribution of a 4-level element with linewidth errors, and (b) relationship between linewidth errors and diffraction efficiency.

Fig. 8. Phase distribution of a 4-level membrane FZL with width transfer errors.

Fig. 9. Phase distribution of a 4-level membrane FZL with depth transfer errors.

Fig. 10. Relationship between transfer errors and diffraction efficiency.

Fig. 11. Photo of 4-step level membrane FZL.

Fig. 12. (a)–(b) Micrographs of two observations in 200× magnification, (c) cross-section profile at the outermost period of diffractive membrane, and (d) 3D scanning result.

Fig. 13. (a) Linewidths on membrane and (b) test result of each step depth on the membrane.

Fig. 14. Distribution map of different diffractive orders.

Table1. Experimental Data of Diffraction Efficiency

关于本站 Cookie 的使用提示

全站搜索

Effects of fabrication errors on diffraction efficiency for a diffractive membrane Download： 971次

Fig. 1. Process flow for a 4-level master FZL fabrication.

Fig. 2. Process flow for a membrane FZL replication.

Fig. 3. Schematic of an on-substrate prefixing fixture.

Fig. 4. Phase distribution of a 4-level diffractive element.

Fig. 5. (a) Phase distribution of a 4-level element with etching depth errors, and (b) relationship between etching depth errors and diffraction efficiency.

Fig. 6. (a) Phase distribution of a 4-level element with overlay registration errors, and (b) relationship between overlay registration errors and diffraction efficiency.

Fig. 7. (a) Phase distribution of a 4-level element with linewidth errors, and (b) relationship between linewidth errors and diffraction efficiency.

Fig. 8. Phase distribution of a 4-level membrane FZL with width transfer errors.

Fig. 9. Phase distribution of a 4-level membrane FZL with depth transfer errors.

Fig. 10. Relationship between transfer errors and diffraction efficiency.

Fig. 11. Photo of 4-step level membrane FZL.

Fig. 12. (a)–(b) Micrographs of two observations in 200× magnification, (c) cross-section profile at the outermost period of diffractive membrane, and (d) 3D scanning result.

Fig. 13. (a) Linewidths on membrane and (b) test result of each step depth on the membrane.

Fig. 14. Distribution map of different diffractive orders.

Table1. Experimental Data of Diffraction Efficiency

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索