等离激元微腔耦合长波红外量子阱高消光比偏振探测器（特邀）

李志锋; 李倩; 景友亮; 周玉伟; 周靖; 陈平平; 周孝好; 李宁; 陈效双; 陆卫

doi:doi:10.3788/IRLA20211006

红外与激光工程, 2021, 50 (1): 20211006, 网络出版: 2021-03-24

等离激元微腔耦合长波红外量子阱高消光比偏振探测器（特邀）下载： 1037次

Plasmonic microcavity coupled high extinction ratio polarimetric long wavelength quantum well infrared photodetectors（Invited）

李志锋李倩景友亮周玉伟周靖陈平平周孝好李宁陈效双陆卫

作者单位

中国科学院上海技术物理研究所红外物理国家重点实验室，上海 200083

图 & 表

图 1. Basic characteristics of surface plasmons^[4]: (a) Schematic diagram of surface plasmons at the interface between a metal and a dielectric;(b) Distribution of the field component of surface plasmons along Z direction; (c) Dispersion curve for a surface plasmon mode 表面等离激元的基本特征^[4]：(a) 金属/介质界面处的表面等离激元；(b) 表面等离激元电场强度在Z方向上的分布；(c) 表面等离激元色散曲线

Fig. 1.

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图 2. Schematic diagram of the unit cell of plasmonic microcavity structure and map of the Z component of the field 单个等离激元微腔结构和电场Z分量分布示意图

Fig. 2.

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图 3. Designed energy levels in the conduction band of quantum wells量子阱的导带结构设计能级示意图

Fig. 3.

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图 4. (a) Cross-section view of waveguide; (b) Distribution of the square of electric component alongZdirection for the waveguide mode being reflected at the structure termination, and waveguide mode is excited at Port 1; (c) Modulus of reflection coefficient of the waveguide mode at the structure termination as a function of wavelength for various metal widths; (d) Phase of reflection coefficient of waveguide mode at the structure termination as a function of wavelength for various metal widths (a) 波导截面示意图；(b) 波导在结构性端面发生反射时电场Z分量平方分布，其中波导在端口1处被激励；(c) 不同金属宽度L波导结构下波导在结构性端面的反射率模函数；(d) 不同金属宽度L波导结构下波导在结构性端面的反射率相位函数

Fig. 4.

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图 5. Schematic diagram of the detection pixel of the PMC-QWIPs and the E_z field map inside the cavity^[7]等离激元微腔结构的单个像元剖面示意图和E_z的场图分布^[7]

Fig. 5.

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图 6. Fabrication flow chart of the PMC-QWIPs等离激元微腔量子阱红外探测器制备流程图

Fig. 6.

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图 7. (a) Designed patterns of the super pixel gratings; (b) SEM image of the fabricated super pixels^[8](a) 超像元光栅结构的设计图形；(b) 实验制备的超像元器件的SEM图^[8]

Fig. 7.

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图 8. Photo-responsivities of the PMC-QWIP device and the 45° edge facet standard device fabricated from the same epitaxial chip^[7]PMC-QWIP器件及45°斜角磨面器件响应率光谱^[7]

Fig. 8.

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图 9. Photocurrent spectra of the four pixels with the different grating orientations^[8]4个不同光栅方向子像元的光电流谱^[8]

Fig. 9.

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图 10. Photocurrent spectra of the G0 pixel under various azimuth angles of the polarizer^[8]0°光栅子像元的光电流谱随入射光偏振方向的变化关系图^[8]

Fig. 10.

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图 11. Peak intensities of the photo response curves of the four pixels vs polarizer azimuth angles. The dots are experimental result and the solid lines are fitting results^[8]4个子像元的光响应峰值强度随偏振片角度的变化曲线，图中数据点为实验结果，而实线为拟合结果^[8]

Fig. 11.

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表 1
Measured extinction ratio of the four PMC-QWIP pixels^[8]
4个等离激元微腔量子阱偏振探测像元实测的偏振消光比^[8]

Table1.

Metal grating direction	Grating symbol	Measured extinction ratio
0°	G0	136
45°	G45	116
90°	G90	131
135°	G135	122

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李志锋, 李倩, 景友亮, 周玉伟, 周靖, 陈平平, 周孝好, 李宁, 陈效双, 陆卫. 等离激元微腔耦合长波红外量子阱高消光比偏振探测器（特邀）[J]. 红外与激光工程, 2021, 50(1): 20211006. Zhifeng Li, Qian Li, Youliang Jing, Yuwei Zhou, Jing Zhou, Pingping Chen, Xiaohao Zhou, Ning Li, Xiaoshuang Chen, Wei Lu. Plasmonic microcavity coupled high extinction ratio polarimetric long wavelength quantum well infrared photodetectors（Invited）[J]. Infrared and Laser Engineering, 2021, 50(1): 20211006.

等离激元微腔耦合长波红外量子阱高消光比偏振探测器（特邀）下载： 1037次

Fig. 1.

图 2. Schematic diagram of the unit cell of plasmonic microcavity structure and map of the Z component of the field 单个等离激元微腔结构和电场Z分量分布示意图

Fig. 2.

图 3. Designed energy levels in the conduction band of quantum wells量子阱的导带结构设计能级示意图

Fig. 3.

Fig. 4.

图 5. Schematic diagram of the detection pixel of the PMC-QWIPs and the E_z field map inside the cavity^[7]等离激元微腔结构的单个像元剖面示意图和E_z的场图分布^[7]

Fig. 5.

图 6. Fabrication flow chart of the PMC-QWIPs等离激元微腔量子阱红外探测器制备流程图

Fig. 6.

图 7. (a) Designed patterns of the super pixel gratings; (b) SEM image of the fabricated super pixels^[8](a) 超像元光栅结构的设计图形；(b) 实验制备的超像元器件的SEM图^[8]

Fig. 7.

图 8. Photo-responsivities of the PMC-QWIP device and the 45° edge facet standard device fabricated from the same epitaxial chip^[7]PMC-QWIP器件及45°斜角磨面器件响应率光谱^[7]

Fig. 8.

图 9. Photocurrent spectra of the four pixels with the different grating orientations^[8]4个不同光栅方向子像元的光电流谱^[8]

Fig. 9.

图 10. Photocurrent spectra of the G0 pixel under various azimuth angles of the polarizer^[8]0°光栅子像元的光电流谱随入射光偏振方向的变化关系图^[8]

Fig. 10.

Fig. 11.

表 1
Measured extinction ratio of the four PMC-QWIP pixels^[8]
4个等离激元微腔量子阱偏振探测像元实测的偏振消光比^[8]

Table1.

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Fig. 1.

图 2. Schematic diagram of the unit cell of plasmonic microcavity structure and map of the Z component of the field 单个等离激元微腔结构和电场Z分量分布示意图

Fig. 2.

图 3. Designed energy levels in the conduction band of quantum wells量子阱的导带结构设计能级示意图

Fig. 3.

Fig. 4.

图 5. Schematic diagram of the detection pixel of the PMC-QWIPs and the Ez field map inside the cavity[7]等离激元微腔结构的单个像元剖面示意图和Ez的场图分布[7]

Fig. 5.

图 6. Fabrication flow chart of the PMC-QWIPs等离激元微腔量子阱红外探测器制备流程图

Fig. 6.

图 7. (a) Designed patterns of the super pixel gratings; (b) SEM image of the fabricated super pixels[8](a) 超像元光栅结构的设计图形；(b) 实验制备的超像元器件的SEM图[8]

Fig. 7.

图 8. Photo-responsivities of the PMC-QWIP device and the 45° edge facet standard device fabricated from the same epitaxial chip[7]PMC-QWIP器件及45°斜角磨面器件响应率光谱[7]

Fig. 8.

图 9. Photocurrent spectra of the four pixels with the different grating orientations[8]4个不同光栅方向子像元的光电流谱[8]

Fig. 9.

图 10. Photocurrent spectra of the G0 pixel under various azimuth angles of the polarizer[8]0°光栅子像元的光电流谱随入射光偏振方向的变化关系图[8]

Fig. 10.

Fig. 11.

表 1Measured extinction ratio of the four PMC-QWIP pixels[8]4个等离激元微腔量子阱偏振探测像元实测的偏振消光比[8]

Table1.

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等离激元微腔耦合长波红外量子阱高消光比偏振探测器（特邀）下载： 1037次

图 5. Schematic diagram of the detection pixel of the PMC-QWIPs and the E_z field map inside the cavity^[7]等离激元微腔结构的单个像元剖面示意图和E_z的场图分布^[7]

图 7. (a) Designed patterns of the super pixel gratings; (b) SEM image of the fabricated super pixels^[8](a) 超像元光栅结构的设计图形；(b) 实验制备的超像元器件的SEM图^[8]

图 8. Photo-responsivities of the PMC-QWIP device and the 45° edge facet standard device fabricated from the same epitaxial chip^[7]PMC-QWIP器件及45°斜角磨面器件响应率光谱^[7]

图 9. Photocurrent spectra of the four pixels with the different grating orientations^[8]4个不同光栅方向子像元的光电流谱^[8]

图 10. Photocurrent spectra of the G0 pixel under various azimuth angles of the polarizer^[8]0°光栅子像元的光电流谱随入射光偏振方向的变化关系图^[8]

表 1
Measured extinction ratio of the four PMC-QWIP pixels^[8]
4个等离激元微腔量子阱偏振探测像元实测的偏振消光比^[8]