Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing 
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Songwen Deng, Feng Wang, Shunfu Liu, Gang Li, Long Sun, Yuqi Jin. Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing[J]. Chinese Optics Letters, 2013, 11(s1): S10701.
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Songwen Deng, Feng Wang, Shunfu Liu, Gang Li, Long Sun, Yuqi Jin. Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing[J]. Chinese Optics Letters, 2013, 11(s1): S10701.
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