Chinese Optics Letters, 2013, 11 (s1): S10701, Published Online: May. 30, 2013
Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing Download: 686次
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Songwen Deng, Feng Wang, Shunfu Liu, Gang Li, Long Sun, Yuqi Jin. Residual stress prediction and control of Ta2O5/SiO2 multilayer based on layer structure designing[J]. Chinese Optics Letters, 2013, 11(s1): S10701.