基于双路比值条纹计数法的法布里-珀罗腔位移传感器

舒卓; 童斌; 徐春晖; 陈凤翔; 黎敏

doi:doi:10.3788/cjl201340.1005003

中国激光, 2013, 40 (10): 1005003, 网络出版: 2013-09-06

基于双路比值条纹计数法的法布里-珀罗腔位移传感器

Dual-Fiber Fabry-Perot Displacement Sensor Based on Ratio Method Fringe Counting Demodulation

论文大纲

舒卓 ^*童斌徐春晖陈凤翔黎敏

作者单位

武汉理工大学物理系, 湖北武汉 430070

传感器光纤位移传感器法布里-珀罗干涉仪条纹计数法比值 sensors optical fiber displacement sensor Fabry-Perot interferometer fringe counting ratio

摘要

为了解决普通条纹计数法在余弦信号极大/极小值位置难于判向的问题，提出一种基于双法布里-珀罗(F-P)干涉仪的比值条纹计数法。利用正切信号在相位为π/2整数倍时发生跳变的特点，取两路正交余弦干涉信号的比值（即为正切信号），再通过对跳变脉冲计数，在测量相位差大小的同时，实现了对相位变化方向的判定。本方法对传感器两光路之间的初始相位差无严格要求，安装调试简单。实验结果表明，以位移传感为例，系统在0~1 mm的测量范围内，线性相关系数达到0.9999，线性度为0.306%，误差限值为±3 μm。

Abstract

Conventional fringe counting method has difficulty in direction judgment, especially at the peak or valley of cosine signal. In order to overcome this problem, we present a double Fabry-Perot (F-P) interferometer using a ratio fringe counting approach. Since the value of tangent signal jumps at which phase is an integer multiple of π/2, we use two orthogonal cosine interference signal ratio to get the tangent signal. Meantime, by counting the number of pulse, we can not only measure the phase difference but also judge the direction change. This approach has no strict requirement for initial phase difference of two optic paths. It′s very feasible for manufacturing, and experimental results demonstrate the linearly dependent coefficient up to 0.9999, a good linearity to 0.306% and a displacement resolution to ±3 μm within a dynamic range from 0 to 1mm of the sensor system.

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舒卓, 童斌, 徐春晖, 陈凤翔, 黎敏. 基于双路比值条纹计数法的法布里-珀罗腔位移传感器[J]. 中国激光, 2013, 40(10): 1005003. Shu Zhuo, Tong Bin, Xu Chunhui, Chen Fengxiang, Li Min. Dual-Fiber Fabry-Perot Displacement Sensor Based on Ratio Method Fringe Counting Demodulation[J]. Chinese Journal of Lasers, 2013, 40(10): 1005003.

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