ArF准分子激光器的窄线宽可调谐运转及注入放大

王杰; 吴峰; 施翔春; 肖绪辉; 姚建铨

中国激光, 1997, 24 (9): 784, 网络出版: 2006-10-31

ArF准分子激光器的窄线宽可调谐运转及注入放大

On Tunable, Narrow Spectral Width Operation of a KrF Laser and Injected Amplification

论文大纲

王杰吴峰施翔春肖绪辉姚建铨

作者单位

天津大学精密仪器与光电工程学院激光与光电子研究所, 天津 300072

ArF准分子激光器窄线宽可调谐注入放大 ArF excimer laser narrow spectral width tunable injection amplification

摘要

在一台快放电泵浦的ArF准分子激光振荡放大系统的振荡级上采用光栅、扩束镜、光阑等腔内元件，用组合输出镜获得了线宽小于0.1 nm，调谐范围～1 nm的激光输出。注入到非稳腔结构的放大级，注入后放大级效率提高了约50%，获得了平均30 mJ/脉冲的高光束质量的窄线宽可调谐激光，最大单脉冲能量＞50 mJ，并进行了氧气的吸收光谱实验。

Abstract

We obtain a spectral width less than 0.1 nm and a tunability about 1 nm by adding a grating, a beam expander, shutters and a combining lens in the oscillator of a discharge pumped ArF laser oscillator amplifier system. The output power is injected into the amplifier that produces an average energy of 30 mJ/pulse, and the tunable, narrow spectral, and very low beam divergence laser output. The efficiency is increased about 50 percent after injection. A peak output of more than 50 mJ/pulse is achieved. The O2 absorption of the ArF laser is also measured.

参考文献

[1] R. Miles, W. Lempert. Two-dimensional measurement of density, velocity and temperature in turblent high-speed air flows by UV rayleigh scattering. Appl. Phys. B, 1990, 51(1): 1～7

[2] R. Miles, C. Cohen, J. Connors et al.. Velocity measurement by vibrational tagging and fluoresentprobing of oxygen. Opt. Lett., 1987, 12(11): 861～863

[3] 成序三,楼祺洪,郑承恩等. Blumlein放电长脉冲XeCl激光器的窄线宽输出. 中国激光, 1985, 13(1): 36

[4] 成序三,王润文. 高平均功率窄线宽KrF准分子激光系统的研究. 光学学报, 1992, 12(6): 511～515

[5] 赵振声. ArF准分子激光振荡放大系统通过国家鉴定. 光电子技术与信息, 1996, 9(1): 46

[6] J. J. Ewing. Excimer laser, Laser Hand Book, edited by M L. STTTCH, 1979, 3: 192

王杰, 吴峰, 施翔春, 肖绪辉, 姚建铨. ArF准分子激光器的窄线宽可调谐运转及注入放大[J]. 中国激光, 1997, 24(9): 784. 王杰, 吴峰, 施翔春, 肖绪辉, 姚建铨. On Tunable, Narrow Spectral Width Operation of a KrF Laser and Injected Amplification[J]. Chinese Journal of Lasers, 1997, 24(9): 784.

ArF准分子激光器的窄线宽可调谐运转及注入放大

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