光学学报, 2018, 38 (8): 0814002, 网络出版: 2019-05-09
压电式倾斜镜迟滞特性及其实验研究 
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Hysteresis Characteristics of Steering Mirror Driven by Piezoelectric Actuator and Its Experimental Research
图 & 表
图 4. 100 Hz等幅验证曲线。(a)物理系统输出(蓝色)与仿真模型输出(绿色); (b)物理系统与仿真模型输出误差
Fig. 4. 100 Hz verification curve with the constant amplitude. (a) Physical system output (blue) and simulation model output (green); (b) output error of physical system and simulation model
图 5. 100 Hz减幅验证曲线。(a)物理系统输出(蓝色)与仿真模型输出(绿色); (b)物理系统与仿真模型输出误差
Fig. 5. 100 Hz verification curve with decreasing amplitude. (a) Physical system output (blue) and simulation model output (green); (b) output error of physical system and simulation model
图 7. 50 Hz等幅正弦系统验证曲线。(a)补偿前后曲线; (b)未补偿线性误差; (c)补偿后线性误差
Fig. 7. Verification curve with 50 Hz sine input and the constant amplitude. (a) Before and after compensation curves; (b) linear error before compensation; (c) linear error after compensation
表 1不同频率正弦输入信号下测试线性度
Table1. Test linearity by sine input signal with different frequencies
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表 2不同频率反馈控制与复合控制均方误差
Table2. Mean square error of feedback control and compound control with different frequencies
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于志亮, 姜晓明, 曹开锐, 李松, 王岩. 压电式倾斜镜迟滞特性及其实验研究[J]. 光学学报, 2018, 38(8): 0814002. Zhiliang Yu, Xiaoming Jiang, Kairui Cao, Song Li, Yan Wan. Hysteresis Characteristics of Steering Mirror Driven by Piezoelectric Actuator and Its Experimental Research[J]. Acta Optica Sinica, 2018, 38(8): 0814002.
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